Surface characterization using infrared reflection absorption spectroscopy on Si(100) processed by wet cleaning and gas treatment
1997 ◽
Vol 113-114
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pp. 398-402
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1994 ◽
Vol 98
(15)
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pp. 4076-4082
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2019 ◽
Vol 90
(5)
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pp. 053903
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2007 ◽
Vol 93
(9)
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pp. 3132-3141
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1994 ◽
Vol 98
(37)
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pp. 9242-9246
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2005 ◽
Vol 404
(4-6)
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pp. 346-350
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