In situ study of atomic layer epitaxy growth of tantalum oxide thin films from Ta(OC2H5)5 and H2O

1997 ◽  
Vol 112 ◽  
pp. 236-242 ◽  
Author(s):  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Hele Siimon ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Thin Films ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Oxide Thin Films ◽  
In Situ Study

Growth of gallium oxide thin films from gallium acetylacetonate by atomic layer epitaxy

1996 ◽  
Vol 6 (1) ◽  
pp. 27-31 ◽  
Author(s):  
Minna Nieminen ◽  
Lauri Niinistö ◽  
Eero Rauhala
Keyword(s):  
Thin Films ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Oxide Thin Films

scholarly journals In-Situ Study of Nb Oxide Thin Films Using Electron Energy Loss Spectroscopy

2011 ◽  
Vol 17 (S2) ◽  
pp. 798-799
Author(s):  
R Tao ◽  
R Klie ◽  
A Romanenko ◽  
L Cooley
Keyword(s):  
Thin Films ◽  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Oxide Thin Films ◽  
In Situ Study ◽  
Electron Energy Loss

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Comparison of the Atomic Layer Deposition of Tantalum Oxide Thin Films Using Ta(NtBu)(NEt2)3, Ta(NtBu)(NEt2)2Cp, and H2O

2016 ◽  
Vol 9 (1) ◽  
pp. 537-547 ◽  
Author(s):  
Seul Ji Song ◽  
Taehyung Park ◽  
Kyung Jean Yoon ◽  
Jung Ho Yoon ◽  
Dae Eun Kwon ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Properties of tantalum oxide thin films grown by atomic layer deposition

1995 ◽  
Vol 260 (2) ◽  
pp. 135-142 ◽  
Author(s):  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Oksana Kohan ◽  
Teet Uustare ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition
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