Growth of gallium oxide thin films from gallium acetylacetonate by atomic layer epitaxy

1996 ◽  
Vol 6 (1) ◽  
pp. 27-31 ◽  
Author(s):  
Minna Nieminen ◽  
Lauri Niinistö ◽  
Eero Rauhala
Keyword(s):  
Thin Films ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Oxide Thin Films

Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment

2019 ◽  
Vol 40 (1) ◽  
pp. 012806 ◽  
Author(s):  
Hui Hao ◽  
Xiao Chen ◽  
Zhengcheng Li ◽  
Yang Shen ◽  
Hu Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Plasma Pretreatment

Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition

2020 ◽  
Vol 12 (39) ◽  
pp. 44225-44237
Author(s):  
Elham Rafie Borujeny ◽  
Oles Sendetskyi ◽  
Michael D. Fleischauer ◽  
Kenneth C. Cadien
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Thermal Budget ◽  
Layer Deposition ◽  
Low Thermal Budget

Growth of Indium‐Tin‐Oxide Thin Films by Atomic Layer Epitaxy

1995 ◽  
Vol 142 (10) ◽  
pp. 3538-3541 ◽  
Author(s):  
Timo Asikainen ◽  
Mikko Ritala ◽  
Markku Leskelä
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Oxide Thin Films

Surface-controlled growth of magnesium oxide thin films by atomic layer epitaxy

1999 ◽  
Vol 9 (10) ◽  
pp. 2449-2452 ◽  
Author(s):  
Matti Putkonen ◽  
Leena-Sisko Johansson ◽  
Eero Rauhala ◽  
Lauri Niinistö
Keyword(s):  
Thin Films ◽  
Magnesium Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Controlled Growth ◽  
Oxide Thin Films

In situ study of atomic layer epitaxy growth of tantalum oxide thin films from Ta(OC2H5)5 and H2O

1997 ◽  
Vol 112 ◽  
pp. 236-242 ◽  
Author(s):  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Hele Siimon ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Thin Films ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Oxide Thin Films ◽  
In Situ Study
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