Thin film deposition of conductive tin oxide from tetramethyltin in a low pressure glow discharge diode reactor

1994 ◽  
Vol 241 (1-2) ◽  
pp. 282-286 ◽  
Author(s):  
Y. Farber ◽  
F. Khonsari-Arefi ◽  
J. Amouroux
Keyword(s):  
Thin Film ◽  
Glow Discharge ◽  
Tin Oxide ◽  
Thin Film Deposition ◽  
Low Pressure ◽  
Film Deposition ◽  
Pressure Glow Discharge

Organic thin film deposition in atmospheric pressure glow discharge

1996 ◽  
Author(s):  
S. Okazaki ◽  
M. Kogoma ◽  
T. Yokoyama ◽  
M. Kodama ◽  
H. Nomiyama ◽  
...  
Keyword(s):  
Thin Film ◽  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Atmospheric Pressure Glow Discharge ◽  
Organic Thin Film ◽  
Pressure Glow Discharge

Dust particle formation in low pressure Ar/CH4 and Ar/C2H2 discharges used for thin film deposition

Vacuum ◽  
2003 ◽  
Vol 71 (3) ◽  
pp. 377-390 ◽  
Author(s):  
J Berndt ◽  
S Hong ◽  
E Kovačević ◽  
I Stefanović ◽  
J Winter
Keyword(s):  
Thin Film ◽  
Dust Particle ◽  
Thin Film Deposition ◽  
Low Pressure ◽  
Particle Formation ◽  
Film Deposition
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