A method for determination of the effective diffusion coefficient and sputtering rate during plasma diffusion treatment

1998 ◽  
Vol 99 (3) ◽  
pp. 234-241 ◽  
Author(s):  
V.I. Dimitrov ◽  
J. D'Haen ◽  
G. Knuyt ◽  
C. Quaeyhaegens ◽  
L.M. Stals
2008 ◽  
Vol 96 (2) ◽  
Author(s):  
C. J. Lu ◽  
C. L. Liu ◽  
T. Chen ◽  
J. Wang ◽  
X. Y. Wang ◽  
...  

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