Chromium nitride/niobium nitride superlattice coatings deposited by combined cathodic-arc/unbalanced magnetron technique

1999 ◽  
Vol 116-119 ◽  
pp. 727-734 ◽  
Author(s):  
P.E. Hovsepian ◽  
D.B. Lewis ◽  
W.-D. Müunz ◽  
A. Rouzaud ◽  
P. Juliet
Keyword(s):  
Niobium Nitride ◽  
Chromium Nitride ◽  
Unbalanced Magnetron ◽  
Cathodic Arc

Chromium nitride/niobium nitride nano-scale multilayer coatings deposited at low temperature by the combined cathodic arc/unbalanced magnetron technique

2006 ◽  
Vol 503 (1-2) ◽  
pp. 133-142 ◽  
Author(s):  
D.B. Lewis ◽  
D. Reitz ◽  
C. Wüstefeld ◽  
R. Ohser-Wiedemann ◽  
H. Oettel ◽  
...  
Keyword(s):  
Low Temperature ◽  
Niobium Nitride ◽  
Chromium Nitride ◽  
Multilayer Coatings ◽  
Nano Scale ◽  
Unbalanced Magnetron ◽  
Cathodic Arc

Properties of chromium nitride coatings deposited by cathodic arc evaporation

1993 ◽  
Vol 61 (1-3) ◽  
pp. 223-226 ◽  
Author(s):  
Robert R. Aharonov ◽  
Bernard F. Coll ◽  
Raymond P. Fontana
Keyword(s):  
Chromium Nitride ◽  
Nitride Coatings ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

Large-Scale Manufacturing of Nanoscale Multilayered Hard Coatings Deposited by Cathodic Arc/Unbalanced Magnetron Sputtering

MRS Bulletin ◽  
2003 ◽  
Vol 28 (3) ◽  
pp. 173-179 ◽  
Author(s):  
W.-D. Münz
Keyword(s):  
Magnetron Sputtering ◽  
Physical Vapor Deposition ◽  
Large Scale ◽  
Hard Coatings ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Gas Atmosphere ◽  
Plastic Hardness ◽  
Corrosion Resistant Coatings ◽  
Cathodic Arc

AbstractNanoscale multilayered (superlattice) hard coatings can be manufactured in a plastic hardness range (HP) between 25GPa and 55 GPa by a combination of cathodic arc evaporation and unbalanced magnetron sputtering (arc bond sputter technology). Using large-scale industrial physical vapor deposition (PVD) equipment and a sufficiently high pumping speed, multilayered coatings can be deposited by simultaneously operating cathodes without special shutter and shielding facilities in a common reactive-gas atmosphere. The efficiency of the process is in many cases identical to that of TiN and CrN. Temperature-resistant, wear-resistant, and corrosion-resistant coatings of various compositions have been produced under industrial conditions. So far, the main applications concentrate on metal-forming and on cutting die steel, Inconel, stainless steel, and titanium. Applications have also been found in the chemical, textile, medical, and automotive industries.

Sign in / Sign up

Export Citation Format

Share Document