Internal stress control of boron thin film

1998 ◽  
Vol 39-40 ◽  
pp. 493-497 ◽  
Author(s):  
N Satomi ◽  
M Kitamura ◽  
T Sasaki ◽  
M Nishikawa
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Stress Control

Fundamental research of internal stress control in the diaphragm structure of the thin film metallic glass

2018 ◽  
Vol 2018.67 (0) ◽  
pp. 221
Author(s):  
Ryuji ISHIKI ◽  
Shohei UEJIMA ◽  
Mizue MIZOSHIRI ◽  
Junpei SAKURAI ◽  
Seiichi HATA
Keyword(s):  
Thin Film ◽  
Metallic Glass ◽  
Internal Stress ◽  
Stress Control ◽  
Fundamental Research

Internal stress control of micro-structures using a thin film metallic glass

2016 ◽  
Vol 2016 (0) ◽  
pp. J2240102
Author(s):  
Shuhei ABE ◽  
Takuya MAETANI ◽  
Mizue MIZOSHIRI ◽  
Junpei SAKURAI ◽  
Seiichi HATA
Keyword(s):  
Thin Film ◽  
Metallic Glass ◽  
Internal Stress ◽  
Stress Control ◽  
Micro Structures

Spalling Technology of PZT Thin Film Capacitor using Internal Stress

2014 ◽  
Vol 134 (4) ◽  
pp. 85-89
Author(s):  
Kazutaka Sueshige ◽  
Fumiaki Honda ◽  
Tadatomo Suga ◽  
Masaaki Ichiki ◽  
Toshihiro Itoh
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Thin Film

Transfer of Ferroelectric Thin Film Capacitor Using Internal Stress of Plated Film

2021 ◽  
Vol 141 (2) ◽  
pp. 39-43
Author(s):  
Kazutaka Sueshige ◽  
Masahisa Fujino ◽  
Tadatomo Suga ◽  
Masaaki Ichiki
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Ferroelectric Thin Film ◽  
Film Capacitor ◽  
Thin Film Capacitor
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