Measurement of nitrogen in Czochralski silicon by means of infrared spectroscopy
2003 ◽
Vol 102
(1-3)
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pp. 228-232
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2014 ◽
Vol 1004-1005
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pp. 293-296
1997 ◽
Vol 12
(11)
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pp. 1404-1408
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1997 ◽
Vol 103
(1)
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pp. 204
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2009 ◽
Vol 404
(23-24)
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pp. 4549-4551
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