Analysis of the role of fluorine content on the thermal stability of a-C:H:F thin films
2002 ◽
Vol 11
(3-6)
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pp. 1100-1105
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2021 ◽
Vol 46
(5)
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pp. 4137-4153
2001 ◽
Vol 37
(4)
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pp. 1776-1778
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1991 ◽
Vol 266
(3)
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pp. 1866-1871
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2006 ◽