scholarly journals Thermal stability of copper nitride thin films: The role of nitrogen migration

2010 ◽  
Vol 107 (10) ◽  
pp. 103513 ◽  
Author(s):  
R. Gonzalez-Arrabal ◽  
N. Gordillo ◽  
M. S. Martin-Gonzalez ◽  
R. Ruiz-Bustos ◽  
F. Agulló-López
2021 ◽  
Vol 46 (5) ◽  
pp. 4137-4153
Author(s):  
Neha Verma ◽  
Rob Delhez ◽  
Niek M. van der Pers ◽  
Frans D. Tichelaar ◽  
Amarante J. Böttger

2018 ◽  
Vol 142 ◽  
pp. 181-192 ◽  
Author(s):  
Aslan Ahadi ◽  
Arvind R. Kalidindi ◽  
Junpei Sakurai ◽  
Yoshitaka Matsushita ◽  
Koichi Tsuchiya ◽  
...  

2013 ◽  
Vol 2013 ◽  
pp. 1-6 ◽  
Author(s):  
Guangan Zhang ◽  
Zhibin Lu ◽  
Jibin Pu ◽  
Guizhi Wu ◽  
Kaiyuan Wang

Copper nitride (Cu3N) thin films were deposited on glass via DC reactive magnetron sputtering at various N2 flow rates and partial pressures with 150°C substrate temperature. X-ray diffraction and scanning electron microscopy were used to characterize the microstructure and morphology. The results show that the films are composed of Cu3N crystallites with anti-ReO3 structure. The microstructure and morphology of the Cu3N film strongly depend on the N2 flow rate and partial pressure. The cross-sectional micrograph of the film shows typical columnar, compact structure. The thermal stabilities of the films were investigated using vacuum annealing under different temperature. The results show that the introducing of argon in the sputtering process decreases the thermal stability of the films.


2013 ◽  
Vol 536 ◽  
pp. 39-49 ◽  
Author(s):  
Akhil Tayal ◽  
Mukul Gupta ◽  
Ajay Gupta ◽  
M. Horisberger ◽  
J. Stahn

2002 ◽  
Vol 11 (3-6) ◽  
pp. 1100-1105 ◽  
Author(s):  
L. Valentini ◽  
E. Braca ◽  
J.M. Kenny ◽  
G. Fedosenko ◽  
J. Engemann ◽  
...  

1991 ◽  
Vol 235 ◽  
Author(s):  
M. Kopcewicz ◽  
J. Jagielski ◽  
A. Turos ◽  
D. L. Williamson

ABSTRACTThe role of alloying elements such as Cr and Al in the formation and stability of the nitride phases formed due to N ion implantation into metallic iron was studied by conversion electron Mössbauer spectroscopy (CEMS). The thermal stability of nitride phases upon 1 h annealing was greatly increased as a result of co-implanting either Cr or Al with N as compared to pure α-Fe implanted only with N.


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