DC bias effects in the deposition of a-C:H films using the screen-grid method in electron cyclotron resonance chemical vapour deposition
1998 ◽
Vol 7
(8)
◽
pp. 1213-1218
◽
1999 ◽
Vol 8
(2-5)
◽
pp. 477-480
◽
2000 ◽
Vol 123
(2-3)
◽
pp. 134-139
◽
1997 ◽
Vol 36
(1-4)
◽
pp. 53-60
◽
2002 ◽
Vol 11
(3-6)
◽
pp. 1161-1165
◽
1998 ◽
Vol 77
(1)
◽
pp. 197-206
◽