Plasma enhanced chemical vapour deposition of silica thin films in an integrated distributed electron cyclotron resonance reactor

Thin Solid Films ◽

10.1016/s0040-6090(97)00539-7 ◽

1997 ◽

Vol 308-309 ◽

pp. 63-67 ◽

Author(s):

P Bulkin ◽

N Bertrand ◽

B Drévillon ◽

J.C Rostaing ◽

F Delmotte ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Silica Thin Films

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Physical and electrical analysis of silicon dioxide thin films produced by electron-cyclotron resonance chemical-vapour deposition

Microelectronic Engineering ◽

10.1016/s0167-9317(97)00014-2 ◽

1997 ◽

Vol 36 (1-4) ◽

pp. 53-60 ◽

Author(s):

D. Landheer ◽

L.-Å. Ragnarsson ◽

S. Belkouch

Keyword(s):

Silicon Dioxide ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Electrical Analysis

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Electron cyclotron resonance plasma enhanced chemical vapour deposition and optical properties of SiOx thin films

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(98)00362-7 ◽

1998 ◽

Vol 226 (1-2) ◽

pp. 58-66 ◽

Author(s):

Pavel V Bulkin ◽

Pieter L Swart ◽

Beatrys M Lacquet

Keyword(s):

Optical Properties ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Tungsten–carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system

Surface and Coatings Technology ◽

10.1016/s0257-8972(99)00474-0 ◽

2000 ◽

Vol 123 (2-3) ◽

pp. 134-139 ◽

Author(s):

Rusli ◽

S.F. Yoon ◽

H. Yang ◽

J. Ahn ◽

Q.F. Huang ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Grid Technique ◽

Screen Grid ◽

Carbon Thin Films

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Photoluminescence Evolution of Silicon Carbonitride Thin Films Grown by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapour Deposition

Society of Vacuum Coaters 56th (2013) Annual Technical Conference Proceedings ◽

10.14332/svc13.proc.1110 ◽

2013 ◽

Author(s):

Z. Khatami ◽

P.R.J. Wilson ◽

J. Wojcik ◽

P. Mascher

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Silicon Carbonitride ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Growth of carbon nanotubes on cobalt catalyst film using electron cyclotron resonance chemical vapour deposition without thermal heating

Nanotechnology ◽

10.1088/0957-4484/17/18/003 ◽

2006 ◽

Vol 17 (18) ◽

pp. 4542-4547 ◽

Author(s):

Wen-Tuan Wu ◽

Kuan-Hua Chen ◽

Ching-Ming Hsu

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Cobalt Catalyst ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Thermal Heating ◽

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Application of electron cyclotron resonance chemical vapour deposition in the preparation of hydrogenated boron-doped SiC films

Philosophical Magazine B ◽

10.1080/014186398259950 ◽

1998 ◽

Vol 77 (1) ◽

pp. 197-206

Author(s):

S. F. Yoon, J. Ahn

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Boron Doped ◽

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DC bias effects in the deposition of a-C:H films using the screen-grid method in electron cyclotron resonance chemical vapour deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(98)00180-0 ◽

1998 ◽

Vol 7 (8) ◽

pp. 1213-1218 ◽

Author(s):

S.F Yoon ◽

Rusli ◽

J Ahn ◽

Q Zhang ◽

Y.S Wu ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Grid Method ◽

Electron Cyclotron ◽

Dc Bias ◽

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Electron cyclotron resonance (ECR) plasma-enhanced chemical vapour deposition of silicon dioxide on strained-SiGe films using tetraethylorthosilicate

Bulletin of Materials Science ◽

10.1007/bf02744953 ◽

1998 ◽

Vol 21 (4) ◽

pp. 283-286

Author(s):

L K Bera ◽

S K Ray ◽

H D Banerjee ◽

C K Maiti

Keyword(s):

Silicon Dioxide ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

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On the bonding structure of hydrogenated carbon nitrides grown by electron cyclotron resonance chemical vapour deposition: towards the synthesis of non-graphitic carbon nitrides

Diamond and Related Materials ◽

10.1016/s0925-9635(01)00582-9 ◽

2002 ◽

Vol 11 (3-6) ◽

pp. 1161-1165 ◽

Author(s):

F. Alonso ◽

R. Gago ◽

I. Jiménez ◽

C. Gómez-Aleixandre ◽

U. Kreissig ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Graphitic Carbon ◽

Bonding Structure ◽

Carbon Nitrides

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Formation of high-quality silicon dioxide films by electron cyclotron resonance plasma oxidation and plasma-enhanced chemical vapour deposition

Thin Solid Films ◽

10.1016/s0040-6090(96)08902-x ◽

1997 ◽

Vol 293 (1-2) ◽

pp. 52-62 ◽

Author(s):

D. Landheer ◽

J.E. Hulse ◽

T. Quance

Keyword(s):

Silicon Dioxide ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

High Quality ◽

Resonance Plasma

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