Characterization of diamondlike carbon films grown by super‐wide electron‐cyclotron resonance plasma assisted chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579286 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1068-1071 ◽

Author(s):

A. Ishii ◽

S. Amadatsu ◽

S. Minomo ◽

M. Taniguchi ◽

M. Sugiyo ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamondlike Carbon ◽

Resonance Plasma

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Preparation of nitrogen containing carbon films using chemical vapor deposition enhanced by electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.115442 ◽

1995 ◽

Vol 67 (3) ◽

pp. 353-355 ◽

Author(s):

Tohru Inoue ◽

Shigeo Ohshio ◽

Hidetoshi Saitoh ◽

Kiichiro Kamata

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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00/02894 Preparation and characterization of ZrF4-BaF2-EuF3 planar glass films by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Fuel and Energy Abstracts ◽

10.1016/s0140-6701(00)96807-3 ◽

2000 ◽

Vol 41 (5) ◽

pp. 319-320

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma ◽

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Characterization of ZnO thin film deposited by electron cyclotron resonance plasma-assisted chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2005.08.021 ◽

2006 ◽

Vol 506-507 ◽

pp. 184-187 ◽

Author(s):

Isao Sakaguchi ◽

Haruki Ryoken ◽

Shunichi Hishita ◽

Hajime Haneda

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Zno Thin Film ◽

Resonance Plasma

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Optical and compositional characterization of SiO[sub x]N[sub y] and SiO[sub x] thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1651544 ◽

2004 ◽

Vol 22 (3) ◽

pp. 883 ◽

Author(s):

T. Roschuk ◽

J. Wojcik ◽

X. Tan ◽

J. A. Davies ◽

P. Mascher

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Compositional Characterization ◽

Resonance Plasma

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Deposition of Diamondlike Carbon Films Using Electron Cyclotron Resonance Plasma Chemical Vapor Deposition from Ethylene Gas

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.l1218 ◽

1995 ◽

Vol 34 (Part 2, No. 9B) ◽

pp. L1218-L1220 ◽

Author(s):

Jun-ichi Suzuki ◽

Shigenobu Okada

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Diamondlike Carbon ◽

Resonance Plasma

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Evaluation of the ion bombardment energy for growing diamondlike carbon films in an electron cyclotron resonance plasma enhanced chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581392 ◽

1998 ◽

Vol 16 (4) ◽

pp. 2625-2631 ◽

Author(s):

Dae-Hwan Kang ◽

Seung-Chul Ha ◽

Ki-Bum Kim ◽

Seok-Hong Min

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Ion Bombardment ◽

Carbon Films ◽

Diamondlike Carbon ◽

Bombardment Energy ◽

Resonance Plasma

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Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition

10.1117/12.277064 ◽

1997 ◽

Author(s):

Mark B. Moran ◽

Linda F. Johnson

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamondlike Carbon

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Nitrogenated amorphous carbon films synthesized by electron cyclotron resonance plasma enhanced chemical vapor deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00017-5 ◽

1999 ◽

Vol 8 (8-9) ◽

pp. 1732-1736 ◽

Author(s):

W.-C. Chan ◽

M.-K. Fung ◽

I. Bello ◽

C.-S. Lee ◽

S.-T. Lee

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Resonance Plasma

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Preparation of diamondlike carbon films by electron cyclotron resonance chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.345428 ◽

1990 ◽

Vol 67 (6) ◽

pp. 2890-2893 ◽

Author(s):

I. Nagai ◽

A. Ishitani ◽

H. Kuroda ◽

M. Yoshikawa ◽

N. Nagai

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamondlike Carbon

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Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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