Deconvolution of EELS Spectra Revisited
The exact analysis of EELS-data needs a removal of multiple scattering from the measured low energy spectrum. Several methods have been reported. However, only the Fourierlog deconvolution seems to be widely used, inspite of difficuties with correct phase retrieval. Alternatively, a matrix-deconvolution proposed by one of the authors can be applied. The following comparison of the distinct approaches shows for the first time the limitation of the methods. Surprisingly, we find that the Fourier-log method is restricted to D ≤ π/2 (D is given in units of the mean free path) even if the proposed phase correction is applied. But also the method given by Spence, theoretically applicable for any D, fails for D ≥ 3 in our simulation. These failures may have been overlooked because EELS experimenters avoid specimens with D ≥ π/2, in general.We obtained the single loss distribution S from a measured Al plasmon spectrum of a thin film (d = 50nm) using the Fourier-log algorithm.