High-resolution coherent imaging in STEM
The ultimate aim of high resolution electron microscopy is the accurate determination of the positions and types of the atoms in a specimen. The coherent imaging theory for STEM is reviewed with the emphasis on its potential for achieving this aim by holographic methods. The STEM modes of holography are in many respects equivalent to the corresponding TEM modes, but have the advantage that, because with a FEG electron source the focussed probes have sub-nanometer diameter, a strong signal is obtained from the illuminated region and the problem of shot-noise is much less important.The original proposal for holography by Gabor envisaged the use of a reconstruction process on the recorded hologram to correct for the lens aberrations and hence improve the image resolution. The more general and more challenging problem is to reconstruct the aberration-free wave function at the exit face of the specimen (with its real and imaginary, or amplitude and phase, components) and then to invert the dynamical diffraction process and derive the projected potential distribution of the object.