Applications of Electron Energy Loss Spectroscopy in Materials
Science
The electron energy loss spectrometer developed at Berkeley differs from most other ones in four ways: 1) it uses the projector lens crossover as the spectrometer entrance object plane, 2) its magnet is asymmetric so that the entrance object is de-magnified about 5x, 3) it counts electrons admitted through the energy-selecting slit singly at rates up to 20MHz while adding zero dark count, and 4) it fits neatly at the back of the available leg space of the electron microscope, and requires no substantial alterations to the microscope. The energy resolution attainable routinely at any primary voltage is 3eV over an energy loss range 0 to 1keV, as illustrated by resolving the π* transition on the K-edge of amorphous carbon (Fig. 1). The 3 eV limit comes mainly from 120Hz stray magnetic fields (the 60Hz component has been compensated out). Fast scanning of the spectrum improves the resolution to 1eV (Fig. 2). This indicates that with proper magnetic shielding of the electron flight path, especially in the microscope viewing chamber which is made out of brass, the energy resolution attainable with the spectrometer will be limited only by the energy spread of the primary beam.