The Influence of Specimen Thickness in Quantitative Electron Energy Loss Spectroscopy

Author(s):  
Nestor J. Zaluzec

The application of electron energy loss spectroscopy (EELS) to light element analysis is rapidly becoming an important aspect of the microcharacterization of solids in materials science, however relatively stringent requirements exist on the specimen thickness under which one can obtain EELS data due to the adverse effects of multiple inelastic scattering.1,2 This study was initiated to determine the limitations on quantitative analysis of EELS data due to specimen thickness.

Author(s):  
C. Colliex ◽  
P. Trebbia

The physical foundations for the use of electron energy loss spectroscopy towards analytical purposes, seem now rather well established and have been extensively discussed through recent publications. In this brief review we intend only to mention most recent developments in this field, which became available to our knowledge. We derive also some lines of discussion to define more clearly the limits of this analytical technique in materials science problems.The spectral information carried in both low ( 0<ΔE<100eV ) and high ( >100eV ) energy regions of the loss spectrum, is capable to provide quantitative results. Spectrometers have therefore been designed to work with all kinds of electron microscopes and to cover large energy ranges for the detection of inelastically scattered electrons (for instance the L-edge of molybdenum at 2500eV has been measured by van Zuylen with primary electrons of 80 kV). It is rather easy to fix a post-specimen magnetic optics on a STEM, but Crewe has recently underlined that great care should be devoted to optimize the collecting power and the energy resolution of the whole system.


Author(s):  
David C. Joy ◽  
Suichu Luo ◽  
John R. Dunlap ◽  
Dick Williams ◽  
Siqi Cao

In Physics, Chemistry, Materials Science, Biology and Medicine, it is very important to have accurate information about the stopping power of various media for electrons, that is the average energy loss per unit pathlength due to inelastic Coulomb collisions with atomic electrons of the specimen along their trajectories. Techniques such as photoemission spectroscopy, Auger electron spectroscopy, and electron energy loss spectroscopy have been used in the measurements of electron-solid interaction. In this paper we present a comprehensive technique which combines experimental and theoretical work to determine the electron stopping power for various materials by electron energy loss spectroscopy (EELS ). As an example, we measured stopping power for Si, C, and their compound SiC. The method, results and discussion are described briefly as below.The stopping power calculation is based on the modified Bethe formula at low energy:where Neff and Ieff are the effective values of the mean ionization potential, and the number of electrons participating in the process respectively. Neff and Ieff can be obtained from the sum rule relations as we discussed before3 using the energy loss function Im(−1/ε).


Author(s):  
Zhifeng Shao ◽  
Ruoya Ho ◽  
Andrew P. Somlyo

Electron energy loss spectroscopy (EELS) has been a powerful tool for high resolution studies of elemental distribution, as well as electronic structure, in thin samples. Its foundation for biological research has been laid out nearly two decades ago, and in the subsequent years it has been subjected to rigorous, but by no means extensive research. In particular, some problems unique to EELS of biological samples, have not been fully resolved. In this article we present a brief summary of recent methodological developments, related to biological applications of EELS, in our laboratory. The main purpose of this work was to maximize the signal to noise ratio (S/N) for trace elemental analysis at a minimum dose, in order to reduce the electron dose and/or time required for the acquisition of high resolution elemental maps of radiation sensitive biological materials.Based on the simple assumption of Poisson distribution of independently scattered electrons, it had been generally assumed that the optimum specimen thickness, at which the S/N is a maximum, must be the total inelastic mean free path of the beam electron in the sample.


Author(s):  
M. Isaacson

In an earlier paper1 it was found that to a good approximation, the efficiency of collection of electrons that had lost energy due to an inner shell excitation could be written as where σE was the total excitation cross-section and σE(θ, Δ) was the integral cross-section for scattering within an angle θ and with an energy loss up to an energy Δ from the excitation edge, EE. We then obtained: where , with P being the momentum of the incident electron of velocity v. The parameter r was due to the assumption that d2σ/dEdΩ∞E−r for energy loss E. In reference 1 it was assumed that r was a constant.


Author(s):  
Nestor J. Zaluzec

In a previous paper it was shown that the influence of specimen thickness on quantitative electron energy loss spectroscopy (EELS) can be judged by measuring the intensity ratio of any two characteristic EEL edges as a function of thickness. If the specimen is homogeneous and thickness effects are neglegible then, one can show from Egerton’s formulation that this intensity ratio should be a constant. Any departure from a constant value indicates a breakdown of the quantitative theory due to thickness related effects. It was shown that if the ratio of Ip/IO (Ip = intensity of plasmon loss, IO = intensity of zero loss) exceeds ∼ 0.3 then quantitative analysis can be in significant error. In subsequent work Egerton showed that a better measure is the ratio of ℓn(It/IO) which is related to the ratio of t/λ. Here It is the total energy loss intensity, t the specimen thickness and λ the mean-free path for total inelastic scattering.


1985 ◽  
Vol 62 ◽  
Author(s):  
T. Oikawa ◽  
J. Hosoi ◽  
Y. Kokubo ◽  
Y. Bando ◽  
J. L. Lehman

ABSTRACTElectron energy-loss spectroscopy in the transmission electron microscopy (TEELS) is a powerful technique to investigate the “electron and atom interaction in specimen microareas”.This paper reports some experimental data of TEELS concerning specimen thickness effect and advantages of 400 kV TEM, and introduces newly developed digital processing of EELS spectra, which is a powerful technique to get the information from the specimen materials.


1999 ◽  
Vol 5 (S2) ◽  
pp. 638-639
Author(s):  
D.C. Dufner ◽  
S. Danczyk ◽  
M. Wooldridge

Combustion synthesis has led to many advances in materials science, in part via the synthesis of powders consisting of particles of nanometer dimensions. Particle morphology is a key concern regarding the powders produced, but also of comparable importance is particle composition. Electron energy loss spectroscopy (EELS) and energy-filtering imaging (EFI) can be used to interrogate the gas-phase combustion synthesis environment for elemental particle composition information. Once established, this diagnostic approach can be used to address control of particle composition and other issues associated with particle formation and growth in flames. The evolution of the particle morphology in a laboratory scale combustion synthesis facility can be examined by passing TEM grids directly through the combustion synthesis flame at various heights above the burner surface, as shown in Fig. la. For the current work, SiOx particle samples are obtained from a SilL/^/FL/Ar flame using a rapid probe insertion technique.


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