Elemental Mapping of Materials Using Omega Filter and Imaging Plate
Elemental microanalysis has been important in materials characterization, since the elemental distribution strongly affects the property of various materials. A recently developed post-column energy filter coupled with a slow scan CCD camera makes it possible to carry out elemental mapping with a transmission electron microscope. Here, we develop the elemental mapping technique utilizing the omega filter and imaging plates (3760x3000 pixels). Since the data obtained from the imaging plates consist of a large number of pixels, fine and detailed elemental analysis will be expected.Energy-filtered images were obtained by a JEM-2010 electron microscope installed with an omega-type energy filter, and they were recorded on imaging plates (FDL-UR-V:25 μm/pixel). The width of an energy-selecting slit was set to be 20 eV. Elemental maps were obtained from the energy-filtered images using the three window technique. Special care was taken to reduce the image shifts among the three filtered images used in the three-window method.