Elemental Mapping Using a Field Emission Transmission Electron Microscope with an Imaging Filter

1995 ◽  
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Transmission Electron Microscope ◽  
Elemental Mapping ◽  
Transmission Electron

A New 200kv Energy Filter Field Emission Transmission Electron Microscope

1998 ◽  
Vol 4 (S2) ◽  
pp. 396-397
Author(s):  
T. Kaneyama ◽  
K. Tsuno ◽  
T. Honda ◽  
M. Kersker ◽  
K. Tsuda ◽  
...  
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Field Emission ◽  
Transmission Electron Microscope ◽  
High Resolution Imaging ◽  
Elemental Mapping ◽  
Lens System ◽  
Transmission Electron ◽  
Wide Range ◽  
Resolution Imaging

In the field of biological and materials sciences, the importance of energy filter transmission electron microscope(EF-TEM) is increasing. Because it is a powerful instrument for contrast enhancement and obtaining elemental mapping images. We have developed a 200kV EF-TEM equipped with a fieldemission gun and in-column spectrometer. The new EF-TEM JEM-2010FEF inherits the performance in high resolution imaging and analysis from field emission TEM. The outer view is shown in Fig.l.Figure 2 shows the lens configuration of JEM-2010FEF. An in-column Q-type spectrometer is introduced within the imaging lens system. It was designed to have image distortion less than 1% and dispersion power 1.2p.m/eV for 200keV electrons. There is no need of compensating procedure of distortion. Imaging lens system consists of two objective lenses, three intermediate lenses and three projector lenses. The 8-stage imaging lens system enables wide range of imaging modes equal to conventional TEMs; energy spectroscopic image of magnification from ×200 to × 1,500,000, energy spectroscopic diffraction of camera length from 200mm to 2,000mm.

Development of Line Analysis and Real-Time Elemental Mapping System in Stem Equipped with a Two-Window Energy Filter

2001 ◽  
Vol 7 (S2) ◽  
pp. 1134-1135
Author(s):  
K. Kaji ◽  
T. Aoyama ◽  
S. Taya ◽  
S. Isakozawa
Keyword(s):  
Electron Microscope ◽  
Energy Loss ◽  
Transmission Electron Microscope ◽  
Scanning Transmission Electron Microscope ◽  
Elemental Mapping ◽  
Additional Function ◽  
Edge Structure ◽  
Transmission Electron ◽  
Mapping System ◽  
Scanning Transmission

The ability to obtain elemental maps processed by using inelastically scattered electrons in a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM) is extremely useful in the analysis of materials, and semiconductor devices such as ULSI’s and GMR heads. Electron energy loss spectra (EELS) also give useful information not only to identify unknown materials but also to study chemical bonding states of the objective atoms. Hitachi developed an elemental mapping system, consisting of a STEM (Hitachi, HD- 2000) equipped with a two-window energy filter (Hitachi, ELV-2000), and performed realtime conventional jump-ratio images with nanometer resolution by in-situ calculation of energy-filtered signals [1]. Additional function of acquiring EELS along any lines on specimen has been developed in this system to investigate the energy loss near edge structure (ELNES).Figure 1 shows a schematic figure of the two-window energy filter, consisting of two quadrupole lenses for focusing and zooming spectra, respectively, a magnetic prism spectrometer, a deflection coil and two kinds of electron beam detectors.

Formation mechanism of Sn-patch between SnAgCu solder and Ti/Ni(V)/Cu under bump metallization

2009 ◽  
Vol 24 (8) ◽  
pp. 2638-2643 ◽  
Author(s):  
Kai-Jheng Wang ◽  
Yan-Zuo Tsai ◽  
Jenq-Gong Duh ◽  
Toung-Yi Shih
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Formation Mechanism ◽  
Transmission Electron Microscope ◽  
Electron Probe ◽  
Under Bump Metallization ◽  
Rich Phase ◽  
Snagcu Solder ◽  
Electron Probe Microanalyzer ◽  
Transmission Electron

An Sn-patch formed in Ni(V)-based under bump metallization during reflow and aging. To elucidate the evolution of the Sn-patch, the detailed compositions and microstructure in Sn–Ag–Cu and Ti/Ni(V)/Cu joints were analyzed by a field emission electron probe microanalyzer (EPMA) and transmission electron microscope (TEM), respectively. There existed a concentration redistribution in the Sn-patch, and its microstructure also varied with aging. The Sn-patch consisted of crystalline Ni and an amorphous Sn-rich phase after reflow, whereas V2Sn3 formed with amorphous an Sn-rich phase during aging. A possible formation mechanism of the Sn-patch was proposed.

Development of a Mach-Zehnder type electron interferometer on a 1.2-MV field-emission transmission electron microscope

Microscopy ◽  
2020 ◽  
Vol 69 (6) ◽  
pp. 411-416
Author(s):  
Tetsuya Akashi ◽  
Yoshio Takahashi ◽  
Ken Harada
Keyword(s):  
Electron Microscope ◽  
Single Crystal ◽  
Single Crystals ◽  
Field Emission ◽  
Transmission Electron Microscope ◽  
Beam Splitters ◽  
Interference Fringes ◽  
Transmission Electron ◽  
Performance Results

Abstract We have developed an amplitude-division type Mach-Zehnder electron interferometer (MZ-EI). The developed MZ-EI is composed of single crystals corresponding to amplitude-division beam splitters, lenses corresponding to mirrors and an objective aperture. The spacings and azimuth angles of interference fringes can be controlled by single crystal materials and their orientations and by diffraction spots selected by the objective aperture. We built the MZ-EI on a 1.2-MV field-emission transmission electron microscope and tested its performance. Results showed that interference fringes were created for various spacings and azimuth angles, which demonstrates the practicability of the MZ-EI as an amplitude-division type electron interferometer.

Beam brightness and its reduction in a 1.2-MV cold field-emission transmission electron microscope

2019 ◽  
Vol 202 ◽  
pp. 107-113 ◽  
Author(s):  
Takeshi Kawasaki ◽  
Tetsuya Akashi ◽  
Keigo Kasuya ◽  
Hiroyuki Shinada
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Transmission Electron Microscope ◽  
Transmission Electron
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