Carbon-13 Labeled Polymers:  An Alternative Tracer for Depth Profiling of Polymer Films and Multilayers Using Secondary Ion Mass Spectrometry

2006 ◽  
Vol 78 (10) ◽  
pp. 3452-3460 ◽  
Author(s):  
S. E. Harton ◽  
F. A. Stevie ◽  
Z. Zhu ◽  
H. Ade
Keyword(s):  
Mass Spectrometry ◽  
Polymer Films ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Round-robin test for the measurement of layer thickness of multilayer films by secondary ion mass spectrometry depth profiling

2017 ◽  
Vol 49 (11) ◽  
pp. 1057-1063 ◽  
Author(s):  
Kyung Joong Kim ◽  
Jong Shik Jang ◽  
Joe Bennett ◽  
David Simons ◽  
Mario Barozzi ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Layer Thickness ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Multilayer Films ◽  
Round Robin ◽  
Round Robin Test ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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