Group IV Transition Metal (M = Zr, Hf) Precursors for High-κ Metal Oxide Thin Films

2021 ◽  
Author(s):  
Ga Yeon Lee ◽  
Seungmin Yeo ◽  
Seong Ho Han ◽  
Bo Keun Park ◽  
Taeyong Eom ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Metal Oxide ◽  
Group Iv ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films

scholarly journals Nano Fabrication of Functional Transition Metal Oxide Thin Films

2008 ◽  
Vol 51 (1) ◽  
pp. 37-43
Author(s):  
Naoki SUZUKI ◽  
Hidekazu TANAKA ◽  
Yoshihiko YANAGISAWA ◽  
Satoru YAMANAKA ◽  
Luca PELLEGRINO ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Metal Oxide ◽  
Transition Metal Oxide ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Nano Fabrication ◽  
Functional Transition

scholarly journals New approaches for achieving more perfect transition metal oxide thin films

APL Materials ◽  
2020 ◽  
Vol 8 (4) ◽  
pp. 040904 ◽  
Author(s):  
J. L. MacManus-Driscoll ◽  
Matthew P. Wells ◽  
Chao Yun ◽  
Jung-Woo Lee ◽  
Chang-Beom Eom ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Metal Oxide ◽  
Transition Metal Oxide ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
New Approaches

All-Oxide Crystalline Microelectromechanical Systems: Bending the Functionalities of Transition-Metal Oxide Thin Films

2009 ◽  
Vol 21 (23) ◽  
pp. 2377-2381 ◽  
Author(s):  
Luca Pellegrino ◽  
Michele Biasotti ◽  
Emilio Bellingeri ◽  
Cristina Bernini ◽  
Antonio Sergio Siri ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Metal Oxide ◽  
Microelectromechanical Systems ◽  
Transition Metal Oxide ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films
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