Microstructure and Thermoelectric Properties of Zn1–xAgxSb Thin Films Grown by Single-Target Magnetron Sputtering

SnSe thin films were successfully grown using single-target magnetron sputtering. The SnSe thin film annealed at 700 K exhibits superior thermoelectric performance compared with previously reported SnSe films and polycrystalline SnSe bulk material.

Download Full-text

Effects of RF Magnetron Sputtering Deposition Power on Crystallinity and Thermoelectric Properties of Antimony Telluride and Bismuth Telluride Thin Films on Flexible Substrates

Journal of Electronic Materials ◽

10.1007/s11664-020-08681-y ◽

2021 ◽

Author(s):

Farbod Amirghasemi ◽

Sam Kassegne

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Thermoelectric Properties ◽

Bismuth Telluride ◽

Rf Magnetron Sputtering ◽

Flexible Substrates ◽

Antimony Telluride ◽

Sputtering Deposition ◽

Deposition Power

Download Full-text

Investigation of Thermoelectric Properties for Ge2Sb2Te5 Thin Films Obtained by Magnetron Sputtering

2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus) ◽

10.1109/elconrus51938.2021.9396571 ◽

2021 ◽

Author(s):

Dmitriy V. Pepelyaev ◽

Dmitriy Yu. Terekhov ◽

Irina A. Voloshchuk ◽

Alexey V. Babich

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Thermoelectric Properties

Download Full-text

Effects of oxygen gas pressure on structural, electrical, and thermoelectric properties of (ZnO)3In2O3 thin films deposited by rf magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.2937939 ◽

2008 ◽

Vol 103 (11) ◽

pp. 113703 ◽

Cited By ~ 36

Author(s):

Yuki Orikasa ◽

Naoaki Hayashi ◽

Shigetoshi Muranaka

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Thermoelectric Properties ◽

Rf Magnetron Sputtering ◽

Gas Pressure ◽

Oxygen Gas

Download Full-text

Highly oriented Bi(Pb)‐Sr‐Ca‐Cu‐O superconducting thin films by magnetron sputtering of a single target

Applied Physics Letters ◽

10.1063/1.102307 ◽

1989 ◽

Vol 55 (15) ◽

pp. 1569-1571 ◽

Cited By ~ 24

Author(s):

Y. Hakuraku ◽

S. Higo ◽

T. Ogushi

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Superconducting Thin Films ◽

Single Target

Download Full-text

Initial Studies on The Heteroepitaxial Growth of Thin Films of (AI/In)N on Ain-Seeded (00.1) Sapphire by Single-Target Reactive Magnetron Sputtering

MRS Proceedings ◽

10.1557/proc-263-95 ◽

1992 ◽

Vol 263 ◽

Author(s):

T. J. Kistenmacher ◽

S. A. Ecelberger ◽

W. A. Bryden

Keyword(s):

Thin Films ◽

Chemical Composition ◽

Magnetron Sputtering ◽

Electrical Transport ◽

Growth Parameters ◽

Heteroepitaxial Growth ◽

X Ray ◽

X Ray Scattering ◽

Single Target ◽

A Cell

ABSTRACTThin films of (AI/In)N alloys have been deposited on AIN-nucleated (00.1) sapphire by reactive (pure N2 gas) magnetron sputtering and characterized by X-ray scattering, stylus profilometry, optical spectroscopy, and electrical transport measurements. Initial efforts have concentrated on producing films with compositions near Al0.31In0.69N (bandgap tailored to GaN). The alloy sputtering targets were disks fabricated by cold pressing appropriate molar mixtures of beads of 99.99% purity Al and In. The resulting thin films are composed of heteroepitaxial grains {(00.1)InNll(00.1)sapphire; (10.0)InNll(11.0)Sapphire} and their chemical composition has been deduced from the variation in the a cell constant (as measured by the X-ray precession method) to yield equilibrium film compositions near Al0.04In0.96N and Al0.25In0.75N, respectively. Preliminary results are presented on the dependence of the quality of heteroepitaxial growth and electrical and optical properties of. these AlxIn1−xN alloy films on various growth parameters: such as chemical composition; film thickness; morphology; and substrate temperature.

Download Full-text