scholarly journals Fabrication of Graphoepitaxial Gate-All-Around Si Circuitry Patterned Nanowire Arrays Using Block Copolymer Assisted Hard Mask Approach

ACS Nano ◽  
2021 ◽  
Author(s):  
Tandra Ghoshal ◽  
Ramsankar Senthamaraikannan ◽  
Matthew T. Shaw ◽  
Ross Lundy ◽  
Andrew Selkirk ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Nanowire Arrays ◽  
Hard Mask

Fabrication of Ordered, Large Scale, Horizontally-Aligned Si Nanowire Arrays Based on an In Situ Hard Mask Block Copolymer Approach

2013 ◽  
Vol 26 (8) ◽  
pp. 1207-1216 ◽  
Author(s):  
Tandra Ghoshal ◽  
Ramsankar Senthamaraikannan ◽  
Matthew T. Shaw ◽  
Justin D. Holmes ◽  
Michael A. Morris
Keyword(s):  
Block Copolymer ◽  
Large Scale ◽  
Nanowire Arrays ◽  
Hard Mask ◽  
Si Nanowire

Freestanding nanowire arrays from soft-etch block copolymer templates

Soft Matter ◽  
2007 ◽  
Vol 3 (1) ◽  
pp. 94-98 ◽  
Author(s):  
Edward J. W. Crossland ◽  
Sabine Ludwigs ◽  
Marc A. Hillmyer ◽  
Ullrich Steiner
Keyword(s):  
Block Copolymer ◽  
Nanowire Arrays

Silicon Mold Etching with Hard Mask Stack Using Spherical Structure of Block Copolymer for Bit-Patterned Media with 2.8 Tbit/in.2

2013 ◽  
Vol 52 (8R) ◽  
pp. 086201
Author(s):  
Masaru Kurihara ◽  
Makoto Satake ◽  
Tetsuya Nishida ◽  
Yuko Tsuchiya ◽  
Yasuhiko Tada ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Silicon Mold ◽  
Bit Patterned Media ◽  
Patterned Media ◽  
Hard Mask ◽  
Spherical Structure

Periodic Nanowire Arrays with Alternating Compositions and Structures Fabricated using a Simultaneous Nanowire Formation Step

Soft Matter ◽  
2021 ◽  
Author(s):  
Ofer Burg ◽  
Rajashekharayya Sanguramath ◽  
Elisheva Michman ◽  
Noga Eren ◽  
Inna Popov ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Metallic Nanostructures ◽  
Nanowire Arrays ◽  
Periodic Arrays ◽  
Copolymer Films ◽  
Formation Step ◽  
Hybrid Properties

Arrays of alternating metallic nanostructures present hybrid properties, which are useful for applications such as photonics and catalysis. Block copolymer films provide versatile templates for fabricating periodic arrays of nanowires....

Fabrication of ultra-dense sub-10 nm in-plane Si nanowire arrays by using a novel block copolymer method: optical properties

Nanoscale ◽  
2016 ◽  
Vol 8 (4) ◽  
pp. 2177-2187 ◽  
Author(s):  
Tandra Ghoshal ◽  
Christos Ntaras ◽  
John O'Connell ◽  
Matthew T. Shaw ◽  
Justin D. Holmes ◽  
...  
Keyword(s):  
Optical Properties ◽  
Block Copolymer ◽  
Nanowire Arrays ◽  
Si Nanowire

Improved Observation Contrast of Block-Copolymer Nanodot Pattern Using Carbon Hard Mask (CHM)

2013 ◽  
Vol 534 ◽  
pp. 126-130 ◽  
Author(s):  
Takashi Akahane ◽  
Takuya Komori ◽  
Jing Liu ◽  
Miftakhul Huda ◽  
Zulfakri bin Mohamad ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Carbon Film ◽  
Pattern Transfer ◽  
Si Substrate ◽  
Hard Mask ◽  
Dimethyl Siloxane ◽  
Transfer Pattern

In this work, improvement of the observation contrast was investigated by using a carbon film as the hard mask for pattern transfer of block copolymer (BCP) nanodots. The PS-PDMS (Poly (styrene-b-dimethyl siloxane)) block copolymer was adopted here. The observation contrast was greatly improved after transferring block copolymer (BCP) nanodots pattern to the underlying Si substrate through the carbon hard mask compared that before nanodot pattern transfer. Pattern transfer was also demonstrated to be very effective using carbon hard mask.

Aninsituhard mask block copolymer approach for the fabrication of ordered, large scale, horizontally aligned, Si nanowire arrays on Si substrate

2014 ◽  
Author(s):  
Tandra Ghoshal ◽  
Ramsankar Senthamaraikannan ◽  
Matthew T. Shaw ◽  
Justin D. Holmes ◽  
Michael A. Morris
Keyword(s):  
Block Copolymer ◽  
Large Scale ◽  
Nanowire Arrays ◽  
Si Substrate ◽  
Si Nanowire

“In situ” hard mask materials: a new methodology for creation of vertical silicon nanopillar and nanowire arrays

Nanoscale ◽  
2012 ◽  
Vol 4 (24) ◽  
pp. 7743 ◽  
Author(s):  
Tandra Ghoshal ◽  
Ramsankar Senthamaraikannan ◽  
Matthew T. Shaw ◽  
Justin D. Holmes ◽  
Michael A. Morris
Keyword(s):  
Nanowire Arrays ◽  
Hard Mask
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