Thin-Film Barrier Performance of Zirconium Oxide Using the Low-Temperature Atomic Layer Deposition Method
2014 ◽
Vol 6
(6)
◽
pp. 3799-3804
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2016 ◽
Vol 34
(1)
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pp. 01A136
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Keyword(s):
2014 ◽
Vol 450
◽
pp. 174-180
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2014 ◽
Vol 35
(3)
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pp. 360-362
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2001 ◽
Vol 19
(6)
◽
pp. 2831
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Keyword(s):
2007 ◽
pp. 359-362