Surface Functionalization of Porous Nanostructured Metal Oxide Thin Films Fabricated by Glancing Angle Deposition

2006 ◽  
Vol 18 (22) ◽  
pp. 5260-5266 ◽  
Author(s):  
Shufen Tsoi ◽  
Enrico Fok ◽  
Jeremy C. Sit ◽  
Jonathan G. C. Veinot
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Surface Functionalization ◽  
Glancing Angle Deposition ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Glancing Angle ◽  
Angle Deposition ◽  
Nanostructured Metal

Reactive co-sputtering of tungsten oxide thin films by glancing angle deposition for gas sensors

2019 ◽  
Vol 6 ◽  
pp. 314-318 ◽  
Author(s):  
Xiaolong Xu ◽  
Mohammad Arab Pour Yazdi ◽  
Jean-Baptiste Sanchez ◽  
Alain Billard ◽  
Franck Berger ◽  
...  
Keyword(s):  
Thin Films ◽  
Tungsten Oxide ◽  
Gas Sensors ◽  
Glancing Angle Deposition ◽  
Oxide Thin Films ◽  
Glancing Angle ◽  
Tungsten Oxide Thin Films ◽  
Angle Deposition

Nanostructured Metal Oxide Thin Films for Humidity Sensors

2008 ◽  
Vol 8 (8) ◽  
pp. 1422-1429 ◽  
Author(s):  
John J. Steele ◽  
Michael T. Taschuk ◽  
Michael J. Brett
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Oxide Thin Films ◽  
Humidity Sensors ◽  
Metal Oxide Thin Films ◽  
Nanostructured Metal

Electric field assisted aerosol assisted chemical vapour deposition of nanostructured metal oxide thin films

2013 ◽  
Vol 544 ◽  
pp. 452-456 ◽  
Author(s):  
Anupriya J.T. Naik ◽  
Christopher Bowman ◽  
Naitik Panjwani ◽  
Michael E.A. Warwick ◽  
Russell Binions
Keyword(s):  
Thin Films ◽  
Electric Field ◽  
Metal Oxide ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Nanostructured Metal
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