Study of hafnium oxide thin films deposited by RF magnetron sputtering under glancing angle deposition at varying target to substrate distance

2015 ◽  
Vol 353 ◽  
pp. 459-468 ◽  
Author(s):  
S. Maidul Haque ◽  
K. Divakar Rao ◽  
J.S. Misal ◽  
R.B. Tokas ◽  
D.D. Shinde ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Hafnium Oxide ◽  
Rf Magnetron Sputtering ◽  
Glancing Angle Deposition ◽  
Oxide Thin Films ◽  
Substrate Distance ◽  
Glancing Angle ◽  
Angle Deposition

Reactive co-sputtering of tungsten oxide thin films by glancing angle deposition for gas sensors

2019 ◽  
Vol 6 ◽  
pp. 314-318 ◽  
Author(s):  
Xiaolong Xu ◽  
Mohammad Arab Pour Yazdi ◽  
Jean-Baptiste Sanchez ◽  
Alain Billard ◽  
Franck Berger ◽  
...  
Keyword(s):  
Thin Films ◽  
Tungsten Oxide ◽  
Gas Sensors ◽  
Glancing Angle Deposition ◽  
Oxide Thin Films ◽  
Glancing Angle ◽  
Tungsten Oxide Thin Films ◽  
Angle Deposition

Glancing angle deposition of SiO 2 thin films using a novel collimated magnetron sputtering technique

2017 ◽  
Vol 319 ◽  
pp. 61-69 ◽  
Author(s):  
S. Maidul Haque ◽  
K. Divakar Rao ◽  
S. Tripathi ◽  
Rajnarayan De ◽  
D.D. Shinde ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Glancing Angle Deposition ◽  
Glancing Angle ◽  
Angle Deposition

Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

2017 ◽  
Vol 636 ◽  
pp. 644-657 ◽  
Author(s):  
J. Dervaux ◽  
P.-A. Cormier ◽  
P. Moskovkin ◽  
O. Douheret ◽  
S. Konstantinidis ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Glancing Angle Deposition ◽  
Glancing Angle ◽  
Angle Deposition ◽  
Modeling Study

Fabrication of highly (110)-oriented BaCeO3-based proton-conductive oxide thin films by RF magnetron sputtering method

2016 ◽  
Vol 55 (2S) ◽  
pp. 02BC19 ◽  
Author(s):  
Tomoya Sato ◽  
Takaaki Inoue ◽  
Daichi Ichinose ◽  
Hiroshi Funakubo ◽  
Kiyoshi Uchiyama
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Conductive Oxide
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