An Atmospheric-Pressure Plasma Process for C2F6Removal

2001 ◽  
Vol 35 (8) ◽  
pp. 1587-1592 ◽  
Author(s):  
Moo Been Chang ◽  
Sheng Jen Yu
2019 ◽  
Vol 21 (5) ◽  
pp. 055502 ◽  
Author(s):  
Qinghua HUANG ◽  
Lin XIONG ◽  
Xiaolong DENG ◽  
Zhan SHU ◽  
Qiang CHEN ◽  
...  

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