An Atmospheric-Pressure Plasma Process for C2F6Removal
2001 ◽
Vol 35
(8)
◽
pp. 1587-1592
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2016 ◽
Vol 30
(12)
◽
pp. 26
2004 ◽
Vol 43
(22)
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pp. 7200-7203
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Keyword(s):
2006 ◽
Vol 9
(3)
◽
pp. 365-375
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2019 ◽
Vol 21
(5)
◽
pp. 055502
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Keyword(s):
2009 ◽
Vol 12
(3)
◽
pp. 106-112
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2018 ◽
Vol 336
◽
pp. 67-71
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2020 ◽
Vol 102
◽
pp. 102650
2013 ◽
Vol 27
(7)
◽
pp. 45-51