Studies on non-thermal atmospheric pressure plasma process conditions for groove formation on silicon nitride for silicon solar cells

2009 ◽  
Vol 12 (3) ◽  
pp. 106-112 ◽  
Author(s):  
Toshiyuki Hamada ◽  
Tatsuya Sakoda ◽  
Masahisa Otsubo
Keyword(s):  
Solar Cells ◽  
Silicon Nitride ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Silicon Solar Cells ◽  
Process Conditions ◽  
Plasma Process ◽  
Pressure Plasma

The Selective Emitter Doping of P-Type Solar Cells Using Atmospheric Pressure Plasma Jet

2016 ◽  
Vol 16 (10) ◽  
pp. 10711-10715
Author(s):  
Myoung Soo Yun ◽  
Tae Hun Jo ◽  
Sang-Hyuk Hwang ◽  
In Tae Kim ◽  
Eun Ha Choi ◽  
...  
Keyword(s):  
Solar Cells ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Selective Emitter ◽  
Pressure Plasma

Efficient silicon nitride SiN x :H antireflective and passivation layers deposited by atmospheric pressure PECVD for silicon solar cells

2019 ◽  
Vol 27 (11) ◽  
pp. 1007-1019 ◽  
Author(s):  
Jean‐François Lelièvre ◽  
Bishal Kafle ◽  
Pierre Saint‐Cast ◽  
Paul Brunet ◽  
Romain Magnan ◽  
...  
Keyword(s):  
Solar Cells ◽  
Silicon Nitride ◽  
Atmospheric Pressure ◽  
Silicon Solar Cells ◽  
Passivation Layers
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