Control of Wafer Temperature Uniformity in Rapid Thermal Processing Using an Optimal Iterative Learning Control Technique
2001 ◽
Vol 40
(7)
◽
pp. 1661-1672
◽
2000 ◽
Vol 33
(10)
◽
pp. 123-128
◽
2003 ◽
Vol 16
(1)
◽
pp. 36-44
◽
2020 ◽
Vol 20
(1)
◽
pp. 84-92
2012 ◽
Vol 233
◽
pp. 142-145