Effect of Substrate Temperature on (Micro/Nano)Structure of a-SiC:H Thin Films Deposited by Radio-Frequency Magnetron Sputtering.
2012 ◽
Vol 116
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pp. 21018-21026
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Vol 40
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pp. 2765-2768
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Vol 253
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pp. 4814-4815
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2016 ◽
Vol 307
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pp. 684-689
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pp. 1103-1107
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