In-Situ Grazing Incidence Small-Angle X-ray Scattering Studies on Nanopore Evolution in Low-kOrganosilicate Dielectric Thin Films

2005 ◽  
Vol 38 (8) ◽  
pp. 3395-3405 ◽  
Author(s):  
Byeongdu Lee ◽  
Jinhwan Yoon ◽  
Weontae Oh ◽  
Yongtaek Hwang ◽  
Kyuyoung Heo ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
Dielectric Thin Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Evaluation on Pore Structures of Organosilicate Thin Films by Grazing Incidence Small-Angle X-ray Scattering

2009 ◽  
Vol 113 (38) ◽  
pp. 12623-12627 ◽  
Author(s):  
Hong-Ji Chen ◽  
Sheng-Ying Li ◽  
Xiao-Jun Liu ◽  
Rui-Peng Li ◽  
Detlef-M. Smilgies ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Structures ◽  
Organosilicate Thin Films ◽  
Ray Scattering

scholarly journals Structure of Glancing Incidence Deposited TiO2 Thin Films as Revealed by Grazing Incidence Small-Angle X-ray Scattering

ChemPhysChem ◽  
2010 ◽  
Vol 11 (10) ◽  
pp. 2205-2208 ◽  
Author(s):  
Lola González-García ◽  
Angel Barranco ◽  
Adela Muñoz Páez ◽  
Agustín R. González-Elipe ◽  
Mari-Cruz García-Gutiérrez ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
Tio2 Thin Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Probing Self-Assembly of Cylindrical Morphology Block Copolymer Using in Situ and ex Situ Grazing Incidence Small-Angle X-ray Scattering: The Attractive Case of Graphoepitaxy

2014 ◽  
Vol 47 (20) ◽  
pp. 7221-7229 ◽  
Author(s):  
Mireille Maret ◽  
Raluca Tiron ◽  
Xavier Chevalier ◽  
Patrice Gergaud ◽  
Ahmed Gharbi ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Small Angle ◽  
Self Assembly ◽  
Grazing Incidence ◽  
Ex Situ ◽  
X Ray ◽  
X Ray Scattering ◽  
Attractive Case ◽  
Ray Scattering

Detection of short range order in SiO2 thin-films by grazing-incidence wide and small-angle X-ray scattering

2016 ◽  
Vol 119 (15) ◽  
pp. 154103
Author(s):  
Kohki Nagata ◽  
Atsushi Ogura ◽  
Ichiro Hirosawa ◽  
Tomoyuki Suwa ◽  
Akinobu Teramoto ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Short Range ◽  
Short Range Order ◽  
Grazing Incidence ◽  
Range Order ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering
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