organosilicate thin films
Recently Published Documents

TOTAL DOCUMENTS

18
(FIVE YEARS 0)

H-INDEX

8
(FIVE YEARS 0)
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Removal of organic template of mesoporous organosilicate thin films using supercritical carbon dioxide fluids

2017 ◽  
Vol 56 (7S2) ◽  
pp. 07KF02 ◽  
Author(s):  
Eiichi Kondoh ◽  
Koki Segawa ◽  
Mitsuhiro Watanabe ◽  
Lianhua Jin ◽  
Liping Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Organic Template ◽  
Organosilicate Thin Films ◽  
Supercritical Carbon

Extrinsic time-dependent dielectric breakdown of low-k organosilicate thin films from vacuum-ultraviolet irradiation

2017 ◽  
Vol 35 (2) ◽  
pp. 021509 ◽  
Author(s):  
Xiangyu Guo ◽  
Dongfei Pei ◽  
Huifeng Zheng ◽  
Weiyi Li ◽  
J. Leon Shohet ◽  
...  
Keyword(s):  
Thin Films ◽  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Dielectric Breakdown ◽  
Time Dependent ◽  
Time Dependent Dielectric Breakdown ◽  
Organosilicate Thin Films ◽  
Low K

Study of viscoplastic deformation in porous organosilicate thin films for ultra low-k applications

2013 ◽  
Vol 102 (22) ◽  
pp. 221909 ◽  
Author(s):  
Emil H. Zin ◽  
W. H. Bang ◽  
E. Todd Ryan ◽  
Sean W. King ◽  
Choong-Un Kim
Keyword(s):  
Thin Films ◽  
Viscoplastic Deformation ◽  
Organosilicate Thin Films ◽  
Low K

The effects of low temperature and pressure on the fracture behaviors of organosilicate thin films

2011 ◽  
Vol 26 (19) ◽  
pp. 2524-2532 ◽  
Author(s):  
Soheil Barakat ◽  
Pearl Lee-Sullivan ◽  
Steven A. Vitale ◽  
Ting Y. Tsui
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Fracture Behaviors ◽  
Temperature And Pressure ◽  
Organosilicate Thin Films ◽  
Image Position

Abstract

Effects of e-beam curing on glass structureand mechanical properties of nanoporous organosilicate thin films

2010 ◽  
Vol 101 (2) ◽  
pp. 228-235 ◽  
Author(s):  
David M. Gage ◽  
Luming Peng ◽  
Jonathan Stebbins ◽  
Kang Sub Yim ◽  
Amir Al-Bayati ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Organosilicate Thin Films

Evaluation on Pore Structures of Organosilicate Thin Films by Grazing Incidence Small-Angle X-ray Scattering

2009 ◽  
Vol 113 (38) ◽  
pp. 12623-12627 ◽  
Author(s):  
Hong-Ji Chen ◽  
Sheng-Ying Li ◽  
Xiao-Jun Liu ◽  
Rui-Peng Li ◽  
Detlef-M. Smilgies ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Structures ◽  
Organosilicate Thin Films ◽  
Ray Scattering

Tailoring UV cure depth profiles for optimal mechanical properties of organosilicate thin films

2009 ◽  
Vol 95 (7) ◽  
pp. 071902 ◽  
Author(s):  
Taek-Soo Kim ◽  
Dmytro Chumakov ◽  
Ehrenfried Zschech ◽  
Reinhold H. Dauskardt
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Depth Profiles ◽  
Organosilicate Thin Films

Molecular-Controlled Fracture and Release of Templated Nanoporous Organosilicate Thin Films

2008 ◽  
Vol 20 (16) ◽  
pp. 3159-3164 ◽  
Author(s):  
Markus D. Ong ◽  
Willi Volksen ◽  
Geraud Dubois ◽  
Victor Lee ◽  
Phillip J. Brock ◽  
...  
Keyword(s):  
Thin Films ◽  
Controlled Fracture ◽  
Organosilicate Thin Films

Thermally Stable Antireflective Coatings Based on Nanoporous Organosilicate Thin Films

Langmuir ◽  
2007 ◽  
Vol 23 (12) ◽  
pp. 6737-6743 ◽  
Author(s):  
Suhan Kim ◽  
Jinhan Cho ◽  
Kookheon Char
Keyword(s):  
Thin Films ◽  
Thermally Stable ◽  
Antireflective Coatings ◽  
Organosilicate Thin Films
Load More ...
Sign in / Sign up

Export Citation Format

Share Document