organosilicate thin films Recently Published Documents

Supercritical Carbon

Extrinsic time-dependent dielectric breakdown of low-k organosilicate thin films from vacuum-ultraviolet irradiation

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4974315 ◽

2017 ◽

Vol 35 (2) ◽

pp. 021509 ◽

Cited By ~ 1

Author(s):

Xiangyu Guo ◽

Dongfei Pei ◽

Huifeng Zheng ◽

Weiyi Li ◽

J. Leon Shohet ◽

...

Keyword(s):

Thin Films ◽

Ultraviolet Irradiation ◽

Vacuum Ultraviolet ◽

Dielectric Breakdown ◽

Time Dependent ◽

Time Dependent Dielectric Breakdown ◽

Low K

Study of viscoplastic deformation in porous organosilicate thin films for ultra low-k applications

Applied Physics Letters ◽

10.1063/1.4809827 ◽

2013 ◽

Vol 102 (22) ◽

pp. 221909 ◽

Cited By ~ 4

Author(s):

Emil H. Zin ◽

W. H. Bang ◽

E. Todd Ryan ◽

Sean W. King ◽

Choong-Un Kim

Keyword(s):

Thin Films ◽

Viscoplastic Deformation ◽

Low K

The effects of low temperature and pressure on the fracture behaviors of organosilicate thin films

Journal of Materials Research ◽

10.1557/jmr.2011.253 ◽

2011 ◽

Vol 26 (19) ◽

pp. 2524-2532 ◽

Cited By ~ 3

Author(s):

Soheil Barakat ◽

Pearl Lee-Sullivan ◽

Steven A. Vitale ◽

Ting Y. Tsui

Keyword(s):

Thin Films ◽

Low Temperature ◽

Fracture Behaviors ◽

Temperature And Pressure ◽

Image Position

Abstract

International Journal of Materials Research (formerly Zeitschrift fuer Metallkunde) ◽

Effects of e-beam curing on glass structureand mechanical properties of nanoporous organosilicate thin films

10.3139/146.110275 ◽

2010 ◽

Vol 101 (2) ◽

pp. 228-235 ◽

Cited By ~ 2

Author(s):

David M. Gage ◽

Luming Peng ◽

Jonathan Stebbins ◽

Kang Sub Yim ◽

Amir Al-Bayati ◽

...

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Evaluation on Pore Structures of Organosilicate Thin Films by Grazing Incidence Small-Angle X-ray Scattering

The Journal of Physical Chemistry B ◽

10.1021/jp905457b ◽

2009 ◽

Vol 113 (38) ◽

pp. 12623-12627 ◽

Cited By ~ 6

Author(s):

Hong-Ji Chen ◽

Sheng-Ying Li ◽

Xiao-Jun Liu ◽

Rui-Peng Li ◽

Detlef-M. Smilgies ◽

...

Keyword(s):

Thin Films ◽

Small Angle ◽

Grazing Incidence ◽

X Ray ◽

X Ray Scattering ◽

Pore Structures ◽

Ray Scattering

Tailoring UV cure depth profiles for optimal mechanical properties of organosilicate thin films

Applied Physics Letters ◽

10.1063/1.3190198 ◽

2009 ◽

Vol 95 (7) ◽

pp. 071902 ◽

Cited By ~ 8

Author(s):

Taek-Soo Kim ◽

Dmytro Chumakov ◽

Ehrenfried Zschech ◽

Reinhold H. Dauskardt

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Depth Profiles ◽

Molecular-Controlled Fracture and Release of Templated Nanoporous Organosilicate Thin Films

Advanced Materials ◽

10.1002/adma.200702665 ◽

2008 ◽

Vol 20 (16) ◽

pp. 3159-3164 ◽

Cited By ~ 8

Author(s):

Markus D. Ong ◽

Willi Volksen ◽

Geraud Dubois ◽

Victor Lee ◽

Phillip J. Brock ◽

...

Keyword(s):

Thin Films ◽

Controlled Fracture ◽

Synchrotron X-ray Reflectivity Studies on Nanoporous Low Dielectric Constant Organosilicate Thin Films

Bulletin of the Korean Chemical Society ◽

10.5012/bkcs.2007.28.12.2481 ◽

2007 ◽

Vol 28 (12) ◽

pp. 2481-2485 ◽

Cited By ~ 4

Keyword(s):

Thin Films ◽

Dielectric Constant ◽

Low Dielectric Constant ◽

X Ray ◽

Low Dielectric ◽

Thermally Stable Antireflective Coatings Based on Nanoporous Organosilicate Thin Films

Langmuir ◽

10.1021/la070003q ◽

2007 ◽

Vol 23 (12) ◽

pp. 6737-6743 ◽

Cited By ~ 62

Author(s):

Suhan Kim ◽

Jinhan Cho ◽

Kookheon Char

Keyword(s):

Thin Films ◽

Thermally Stable ◽

Antireflective Coatings ◽