scholarly journals Nano-precision metrology of X-ray mirrors with laser speckle angular measurement

2021 ◽  
Vol 10 (1) ◽  
Author(s):  
Hongchang Wang ◽  
Simone Moriconi ◽  
Kawal Sawhney

AbstractX-ray mirrors are widely used for synchrotron radiation, free-electron lasers, and astronomical telescopes. The short wavelength and grazing incidence impose strict limits on the permissible slope error. Advanced polishing techniques have already produced mirrors with slope errors below 50 nrad root mean square (rms), but existing metrology techniques struggle to measure them. Here, we describe a laser speckle angular measurement (SAM) approach to overcome such limitations. We also demonstrate that the angular precision of slope error measurements can be pushed down to 20nrad rms by utilizing an advanced sub-pixel tracking algorithm. Furthermore, SAM allows the measurement of mirrors in two dimensions with radii of curvature as low as a few hundred millimeters. Importantly, the instrument based on SAM is compact, low-cost, and easy to integrate with most other existing X-ray mirror metrology instruments, such as the long trace profiler (LTP) and nanometer optical metrology (NOM). The proposed nanometrology method represents an important milestone and potentially opens up new possibilities to develop next-generation super-polished X-ray mirrors, which will advance the development of X-ray nanoprobes, coherence preservation, and astronomical physics.

2018 ◽  
Vol 25 (2) ◽  
pp. 346-353 ◽  
Author(s):  
Ichiro Inoue ◽  
Taito Osaka ◽  
Kenji Tamasaku ◽  
Haruhiko Ohashi ◽  
Hiroshi Yamazaki ◽  
...  

An X-ray prism for the extraction of a specific harmonic of undulator radiation is proposed. By using the prism in a grazing incidence geometry, the beam axes of fundamental and harmonics of undulator radiation are separated with large angles over 10 µrad, which enables the selection of a specific harmonic with the help of apertures, while keeping a high photon flux. The concept of the harmonic separation was experimentally confirmed using X-ray beams from the X-ray free-electron laser SACLA.


1984 ◽  
Vol 86 ◽  
pp. 270-273
Author(s):  
R. Hudec ◽  
B. Valníček

A new technology was developed for manufacturing of precise and low-cost X-ray grazing incidence microscopic optics.Imaging experiments represent one of the main directions in the Czechoslovak X-ray astronomy program. The Space Research Department of the Astronomical Institute of the Czechoslovak Academy of Sciences in Ondřejov has been active in the development of X-ray mirrors since 1970. We have participated in 7 space X-ray imaging experiments. 6 experiments were flown onboard the Vertical 8, 9 and 11 rockets in the years 1979, 1981 and 1983 (Hudec et al. 1984a), one experiment was flown onboard the Soviet orbital station Salyut 7 in the year 1982 (Valníček et al. 1983 and Hudec et al. 1984b). The experiments represent both small solar X-ray imaging telescopes and big stellar X-ray telescope.


2014 ◽  
Vol 369 (1647) ◽  
pp. 20130333 ◽  
Author(s):  
Oleksandr Yefanov ◽  
Cornelius Gati ◽  
Gleb Bourenkov ◽  
Richard A. Kirian ◽  
Thomas A. White ◽  
...  

Serial crystallography using X-ray free-electron lasers enables the collection of tens of thousands of measurements from an equal number of individual crystals, each of which can be smaller than 1 µm in size. This manuscript describes an alternative way of handling diffraction data recorded by serial femtosecond crystallography, by mapping the diffracted intensities into three-dimensional reciprocal space rather than integrating each image in two dimensions as in the classical approach. We call this procedure ‘three-dimensional merging’. This procedure retains information about asymmetry in Bragg peaks and diffracted intensities between Bragg spots. This intensity distribution can be used to extract reflection intensities for structure determination and opens up novel avenues for post-refinement, while observed intensity between Bragg peaks and peak asymmetry are of potential use in novel direct phasing strategies.


1998 ◽  
Vol 5 (3) ◽  
pp. 817-819
Author(s):  
K. Mashima ◽  
N. Kihara ◽  
E. Ishiguro

A design study of monochromators for a 2.0 GeV electron/positron storage ring for high-brilliance synchrotron radiation in the vacuum ultraviolet (VUV) and the soft X-ray regions is described. Two types of VUV/soft X-ray grazing-incidence monochromators, one with a bent parabolic mirror and the other with a varied-spacing grating, are designed. Without any slope error, the expected resolving power of the former is much higher, but the latter is less affected by slope errors of the optical elements.


2000 ◽  
Vol 628 ◽  
Author(s):  
Sophie Besson ◽  
Catherine Jacquiod ◽  
Thierry Gacoin ◽  
André Naudon ◽  
Christian Ricolleau ◽  
...  

ABSTRACTA microstructural study on surfactant templated silica films is performed by coupling traditional X-Ray Diffraction (XRD) and Transmission Electronic Microscopy (TEM) to Grazing Incidence Small Angle X-Ray Scattering (GISAXS). By this method it is shown that spin-coating of silicate solutions with cationic surfactant cetyltrimethylammonium bromide (CTAB) as a templating agent provides 3D hexagonal structure (space group P63/mmc) that is no longer compatible with the often described hexagonal arrangement of tubular micelles but rather with an hexagonal arrangement of spherical micelles. The extent of the hexagonal ordering and the texture can be optimized in films by varying the composition of the solution.


Author(s):  
N.M. Novikovskii ◽  
◽  
V.M. Raznomazov ◽  
V.O. Ponomarenko ◽  
D.A. Sarychev ◽  
...  

Author(s):  
Jonathan Ogle ◽  
Daniel Powell ◽  
Eric Amerling ◽  
Detlef Matthias Smilgies ◽  
Luisa Whittaker-Brooks

<p>Thin film materials have become increasingly complex in morphological and structural design. When characterizing the structure of these films, a crucial field of study is the role that crystallite orientation plays in giving rise to unique electronic properties. It is therefore important to have a comparative tool for understanding differences in crystallite orientation within a thin film, and also the ability to compare the structural orientation between different thin films. Herein, we designed a new method dubbed the mosaicity factor (MF) to quantify crystallite orientation in thin films using grazing incidence wide-angle X-ray scattering (GIWAXS) patterns. This method for quantifying the orientation of thin films overcomes many limitations inherent in previous approaches such as noise sensitivity, the ability to compare orientation distributions along different axes, and the ability to quantify multiple crystallite orientations observed within the same Miller index. Following the presentation of MF, we proceed to discussing case studies to show the efficacy and range of application available for the use of MF. These studies show how using the MF approach yields quantitative orientation information for various materials assembled on a substrate.<b></b></p>


1993 ◽  
Vol 308 ◽  
Author(s):  
Paul R. Besser ◽  
Thomas N. Marieb ◽  
John C. Bravman

ABSTRACTStrain relaxation in passivated Al-0.5% Cu lines was measured using X-ray diffraction coupled with in-situ observation of the formation and growth of stress induced voids. Samples of 1 μm thick Al-0.5% Cu lines passivated with Si3N4 were heated to 380ºC, then cooled and held at 150ºC. During the test, principal strains along the length, width, and height of the line were determined using a grazing incidence x-ray geometry. From these measurements the hydrostatic strain in the metal was calculated and strain relaxation was observed. The thermal cycle was duplicated in a high voltage scanning transmission electron microscope equipped with a backscattered electron detector. The 1.25 μm wide lines were seen to have initial stress voids. Upon heating these voids reduced in size until no longer observable. Once the samples were cooled to 150ºC, voids reappeared and grew. The measured strain relaxation is discussed in terms of void and θ-phase (Al2Cu) formation.


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