New Structure of CTAB Templated Silica Films as revealed by GISAXS coupled to HRTEM

2000 ◽  
Vol 628 ◽  
Author(s):  
Sophie Besson ◽  
Catherine Jacquiod ◽  
Thierry Gacoin ◽  
André Naudon ◽  
Christian Ricolleau ◽  
...  

ABSTRACTA microstructural study on surfactant templated silica films is performed by coupling traditional X-Ray Diffraction (XRD) and Transmission Electronic Microscopy (TEM) to Grazing Incidence Small Angle X-Ray Scattering (GISAXS). By this method it is shown that spin-coating of silicate solutions with cationic surfactant cetyltrimethylammonium bromide (CTAB) as a templating agent provides 3D hexagonal structure (space group P63/mmc) that is no longer compatible with the often described hexagonal arrangement of tubular micelles but rather with an hexagonal arrangement of spherical micelles. The extent of the hexagonal ordering and the texture can be optimized in films by varying the composition of the solution.

2004 ◽  
Vol 812 ◽  
Author(s):  
Nobutoshi Fujii ◽  
Kazuhiro Yamada ◽  
Yoshiaki Oku ◽  
Nobuhiro Hata ◽  
Yutaka Seino ◽  
...  

AbstractPeriodic 2-dimensional (2-D) hexagonal and the disordered pore structure silica films have been developed using nonionic surfactants as the templates. The pore structure was controlled by the static electrical interaction between the micelle of the surfactant and the silica oligomer. No X-ray diffraction peaks were observed for the disordered mesoporous silica films, while the pore diameters of 2.0-4.0 nm could be measured by small angle X-ray scattering spectroscopy. By comparing the properties of the 2-D hexagonal and the disordered porous silica films which have the same porosity, it is found that the disordered porous silica film has advantages in terms of the dielectric constant and Young's modulus as well as the hardness. The disordered porous silica film is more suitable for the interlayer dielectrics for ULSI.


2004 ◽  
Vol 19 (4) ◽  
pp. 347-351
Author(s):  
J. Xu ◽  
X. S. Wu ◽  
B. Qian ◽  
J. F. Feng ◽  
S. S. Jiang ◽  
...  

Ge–Si inverted huts, which formed at the Si∕Ge interface of Si∕Ge superlattice grown at low temperatures, have been measured by X-ray diffraction, grazing incidence X-ray specular and off-specular reflectivities, and transmission electron microscopy (TEM). The surface of the Si∕Ge superlattice is smooth, and there are no Ge–Si huts appearing on the surface. The roughness of the surfaces is less than 3 Å. Large lattice strain induced by lattice mismatch between Si and Ge is found to be relaxed because of the intermixing of Ge and Si at the Si∕Ge interface.


2016 ◽  
Vol 49 (5) ◽  
pp. 1713-1720 ◽  
Author(s):  
Gerhard Fritz-Popovski ◽  
Roland Morak ◽  
Parvin Sharifi ◽  
Heinz Amenitsch ◽  
Oskar Paris

Mesoporous silica films templated by pluronic P123 were prepared using spin and dip coating. The ordered cylindrical structure within the films deforms due to shrinkage during calcination. Grazing-incidence small-angle X-ray scattering (GISAXS) measurements reveal that both the unit cell and the cross section of the pores decrease in size, mainly normal to the surface of the substrate, leading to elliptical cross sections of the pores with axis ratios of about 1:2. Water take-up by the pores upon changing the relative humidity can be monitored quantitatively by the shift in the critical angle of X-ray reflection as seen by the Yoneda peak.


2011 ◽  
Vol 83 ◽  
pp. 204-209
Author(s):  
Rabizah Makhsin Siti ◽  
Abdul Razak Khairunisak ◽  
Zainovia Lockman

This work describes the formation of WO3 nanostructures via seeded growth hydrothermal reaction. WO3 seed formation was first studied using thermal oxidation of W substrate from 300-500°C for 30 minutes. The optimum seeded substrates were then subjected to hydrothermal reaction at 80°C by varying precursor concentration and pH of the solution. Optimum oxidation temperature to produce WO3 seeds was at 400°C for 30 minutes. Below 400°C, no seed was formed while above that temperature the seeds became too compact and less uniform. The optimum hydrothermal reaction parameters were obtained after 24 hrs reaction time, concentration ratio of sodium tungstate dehydrate to cetyltrimethylammonium bromide (CTAB) of 6:1 and at pH 2. By lowering the pH and increasing the precursor concentration, the growth of WO3 nanostructures was enhanced. X-ray diffraction analysis showed that WO3 nanostructures formed were of hexagonal structure.


2003 ◽  
Vol 795 ◽  
Author(s):  
Sinji Takayama ◽  
Makato Oikawa ◽  
Tokuji Himuro

ABSTRACTInternal stresses and thermal stability of strongly (111) oriented Cu thin films, which are one of promising interconnect materials in advanced ULSI devices, have been studied comparing with those of non-oriented Cu films. Their internal stresses parallel to a film surface were measured by a conventional X-ray diffraction technique (d-spacing vs. sin2ψ method), while the strain distribution with depth by a grazing incidence X-ray scattering (GIXS) methods. Large stress relaxation in strongly (111) oriented Cu films takes place at 200°C without showing any significant grain growth and formation of thermal defects like hillocks. The residual internal stresses of highly oriented (111) Cu films increase almost linearly throughout the thickness up to the substrates. The feature of stress distribution in film depth does not change on annealing. The changes of the residual stresses at each depth are nearly the same as stresses parallel to film surface measured.


2016 ◽  
Vol 49 (6) ◽  
pp. 1885-1892 ◽  
Author(s):  
Karol Végsö ◽  
Matej Jergel ◽  
Peter Šiffalovič ◽  
Eva Majková ◽  
Dušan Korytár ◽  
...  

The issue of a high-flux X-ray beam compressing channel-cut monochromator for applications in X-ray metrology is addressed. A Ge(111) compressor with compression ratio 20.3 was designed on the principle of a combination of symmetric and highly asymmetric diffractions. A pilot application of the single-point diamond technology (SPDT) to finish active surfaces of X-ray optics was tested, providing 50% flux enhancement as compared to a Ge(220) counterpart prepared by traditional surface treatment. This is much more than the theoretical 22% forecast and shows the potential of SPDT for preparation of high-flux X-ray compressors with a high compression ratio, where highly asymmetric diffraction with a very low exit angle is inevitable. The implications for efficient collection of X-rays from microfocus X-ray sources are discussed. A comparison of Ge compressors with Ge parallel channel-cut monochromators combined with a 50 µm slit shows the several times higher flux of the former, making them applicable in X-ray diffraction experiments at medium resolution. Furthermore, the Ge(111) compressor was tested as a collimator in high-resolution grazing-incidence small-angle X-ray scattering (GISAXS) measurements of surface gratings, providing experimental resolution close to 400 nm. This is ∼100 nm smaller than that achieved with the Ge(220) compressor but still approximately twice that of commercial SAXS/GISAXS laboratory setups.


2018 ◽  
Vol 115 (38) ◽  
pp. 9373-9378 ◽  
Author(s):  
Jiří Kaleta ◽  
Jin Wen ◽  
Thomas F. Magnera ◽  
Paul I. Dron ◽  
Chenhui Zhu ◽  
...  

In situ grazing-incidence X-ray scattering shows that a monolayer of artificial rod-shaped dipolar molecular rotors produced on the surface of an aqueous subphase in a Langmuir trough has a structure conducive to a 2D ferroelectric phase. The axes of the rotors stand an average of 0.83 nm apart in a triangular grid, perpendicular to the surface within experimental error. They carry 2,3-dichlorophenylene rotators near rod centers, between two decks of interlocked triptycenes installed axially on the rotor axle. The analysis is based first on simultaneous fitting of observed Bragg rods and second on fitting the reflectivity curve with only three adjustable parameters and the calculated rotor electron density, which also revealed the presence of about seven molecules of water near each rotator. Dependent on preparation conditions, a minor and variable amount of a different crystal phase may also be present in the monolayer.


Sign in / Sign up

Export Citation Format

Share Document