scholarly journals Recent advances in secondary ion mass spectrometry of solid acid catalysts: large zeolite crystals under bombardment

2014 ◽  
Vol 16 (12) ◽  
pp. 5465-5474 ◽  
Author(s):  
Jan P. Hofmann ◽  
Marcus Rohnke ◽  
Bert M. Weckhuysen
Keyword(s):  
Mass Spectrometry ◽  
Heterogeneous Catalysts ◽  
Solid Acid ◽  
Secondary Ion Mass Spectrometry ◽  
High Resolution Mass Spectrometry ◽  
Depth Profiling ◽  
Solid Acid Catalysts ◽  
Acid Catalysts ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) is used for the characterization of heterogeneous catalysts. Large zeolite ZSM-5 crystals are discussed as a showcase system for solid acid catalysts and studied in high-resolution mass spectrometry, imaging, and sputter-depth profiling modes.

Round-robin test for the measurement of layer thickness of multilayer films by secondary ion mass spectrometry depth profiling

2017 ◽  
Vol 49 (11) ◽  
pp. 1057-1063 ◽  
Author(s):  
Kyung Joong Kim ◽  
Jong Shik Jang ◽  
Joe Bennett ◽  
David Simons ◽  
Mario Barozzi ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Layer Thickness ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Multilayer Films ◽  
Round Robin ◽  
Round Robin Test ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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