Influence of polycrystalline material on crater shape optimization and roughness using low-power/low-pressure direct-current glow discharge mass spectrometry
Keyword(s):
It is likely that observation of roughness at crater bottom upon GDMS sputtering is due to differential sputtering of grains.
2016 ◽
Vol 118
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pp. 56-61
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2000 ◽
Vol 368
(1)
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pp. 95-102
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1999 ◽
Vol 17
(6)
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pp. 3317-3321
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1997 ◽
Vol 12
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pp. 49-52
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2016 ◽
Vol 122
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pp. 46-51
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1996 ◽
Vol 355
(7-8)
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pp. 858-860
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1993 ◽
Vol 8
(6)
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pp. 867-873
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1995 ◽
Vol 351
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pp. 148-153
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2002 ◽
Vol 88
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pp. 575-579
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