scholarly journals Influence of polycrystalline material on crater shape optimization and roughness using low-power/low-pressure direct-current glow discharge mass spectrometry

2020 ◽  
Vol 35 (7) ◽  
pp. 1450-1457
Author(s):  
Gagan Paudel ◽  
Sergey Khromov ◽  
Martin Kasik ◽  
Hans Jørgen Roven ◽  
Marisa Di Sabatino

It is likely that observation of roughness at crater bottom upon GDMS sputtering is due to differential sputtering of grains.

2002 ◽  
Vol 88 (9) ◽  
pp. 575-579 ◽  
Author(s):  
Shinji ITOH ◽  
Hitoshi YAMAGUCHI ◽  
Toshiyuki HOBO ◽  
Takeshi KOBAYASHI

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