scholarly journals Hollow silicon microneedle fabrication using advanced plasma etch technologies for applications in transdermal drug delivery

Lab on a Chip ◽  
2020 ◽  
Vol 20 (15) ◽  
pp. 2788-2795 ◽  
Author(s):  
Chris J. W. Bolton ◽  
Olivia Howells ◽  
Gareth J. Blayney ◽  
Pey F. Eng ◽  
James C. Birchall ◽  
...  
Keyword(s):  
Drug Delivery ◽  
Production Process ◽  
Transdermal Drug Delivery ◽  
Reactive Ion Etching ◽  
Plasma Etch ◽  
Ion Etching ◽  
Process Flow ◽  
Deep Reactive Ion Etching

A novel production process flow is presented for the manufacture of hollow silicon microneedles using deep reactive-ion etching (DRIE) technology.

Fabrication of Novel Hollow Micro Needles for Biological Applications

2011 ◽  
Vol 1346 ◽  
Author(s):  
Z. Sanaee ◽  
S. Mehrvarz ◽  
M. Mehran ◽  
M. Abdolahad ◽  
M. Sohrabi ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Drug Delivery ◽  
Reactive Ion Etching ◽  
Three Dimensional ◽  
Silicon Substrates ◽  
Biological Applications ◽  
Ion Etching ◽  
Liquid Transport ◽  
Deep Reactive Ion Etching ◽  
Cylindrical Structure

ABSTRACTMicroneedles have applications in drug delivery and biotechnology. We report a novel needle-like hollow cylindrical structure as a base for the growth of carbon nanotubes (CNT) to form a cage-like structure. The formation of hollow microneedle structures is feasible on Si-membranes using proper patterning of the masking layer and combined by a deep reactive ion etching. The formation of highly featured structures at micro and nanometric scale is reported. By controlling the etching parameter one is able to achieve three-dimensional as well as highly vertical structures on silicon substrates. The growth of carbon nanotubes on such structures allows the realization of cage-like carbon-based features which could be suitable for gas and liquid transport.

Advanced deep reactive‐ion etching technology for hollow microneedles for transdermal blood sampling and drug delivery

2013 ◽  
Vol 7 (2) ◽  
pp. 59-62 ◽  
Author(s):  
Yufei Liu ◽  
Pay F. Eng ◽  
Owen J. Guy ◽  
Kerry Roberts ◽  
Huma Ashraf ◽  
...  
Keyword(s):  
Drug Delivery ◽  
Reactive Ion Etching ◽  
Blood Sampling ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Hollow Microneedles

Streamlined cryogenic deep reactive ion etching protocol for hybrid micronozzle arrays

2011 ◽  
Vol 21 (10) ◽  
pp. 105001
Author(s):  
Ahmet Erten ◽  
Milan Makale ◽  
Xuekun Lu ◽  
Bernd Fruhberger ◽  
Santosh Kesari ◽  
...  
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching

scholarly journals Correction to Ultrahigh Resolution Titanium Deep Reactive Ion Etching

2017 ◽  
Vol 9 (27) ◽  
pp. 23263-23263
Author(s):  
Bryan W. K. Woo ◽  
Shannon C. Gott ◽  
Ryan A. Peck ◽  
Dong Yan ◽  
Mathias W. Rommelfanger ◽  
...  
Keyword(s):  
Reactive Ion Etching ◽  
Ultrahigh Resolution ◽  
Ion Etching ◽  
Deep Reactive Ion Etching

Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio

2014 ◽  
Vol 113 ◽  
pp. 35-39 ◽  
Author(s):  
Jayalakshmi Parasuraman ◽  
Anand Summanwar ◽  
Frédéric Marty ◽  
Philippe Basset ◽  
Dan E. Angelescu ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching

Modeling and simulation of the lag effect in a deep reactive ion etching process

2006 ◽  
Vol 16 (12) ◽  
pp. 2570-2575 ◽  
Author(s):  
Yiyong Tan ◽  
Rongchun Zhou ◽  
Haixia Zhang ◽  
Guizhang Lu ◽  
Zhihong Li
Keyword(s):  
Modeling And Simulation ◽  
Reactive Ion Etching ◽  
Etching Process ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Lag Effect
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