Lateral outward growth of single-crystal diamond by two different structures of microwave plasma reactors

CrystEngComm ◽  
2022 ◽  
Author(s):  
Wei Cao ◽  
Zhibin Ma ◽  
Hongyang Zhao ◽  
Deng Gao ◽  
Qiuming Fu
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Lateral Growth ◽  
Plasma Reactors ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Single Crystal Diamond

On a semi-open holder, the homoepitaxial lateral growth of single-crystal diamond (SCD) was carried out via microwave plasma chemical vapor deposition (MPCVD). By tuning and optimizing two different structures of...

Homoepitaxial growth of single crystal diamond by microwave plasma chemical vapor deposition

Carbon ◽  
2017 ◽  
Vol 117 ◽  
pp. 490
Author(s):  
Lei Yan ◽  
Zhi-bin Ma ◽  
Lin Chen ◽  
Qiu-ming Fu ◽  
Chao Wu ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Homoepitaxial Growth ◽  
Single Crystal Diamond

Growth and Characterization of the Laterally Enlarged Single Crystal Diamond Grown by Microwave Plasma Chemical Vapor Deposition

2018 ◽  
Vol 35 (7) ◽  
pp. 078101 ◽  
Author(s):  
Ze-Yang Ren ◽  
Jin-Feng Zhang ◽  
Jin-Cheng Zhang ◽  
Sheng-Rui Xu ◽  
Chun-Fu Zhang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Single Crystal Diamond

Synthesis of boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

2008 ◽  
Vol 17 (7-10) ◽  
pp. 1320-1323 ◽  
Author(s):  
R. Ramamurti ◽  
M. Becker ◽  
T. Schuelke ◽  
T. Grotjohn ◽  
D. Reinhard ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Boron Doped ◽  
Single Crystal Diamond

Step growth in single crystal diamond grown by microwave plasma chemical vapor deposition

2006 ◽  
Vol 15 (2-3) ◽  
pp. 304-308 ◽  
Author(s):  
Pawan K. Tyagi ◽  
Abha Misra ◽  
K.N. Narayanan Unni ◽  
Padmnabh Rai ◽  
Manoj K. Singh ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Single Crystal Diamond ◽  
Step Growth

Deposition of thick boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

2009 ◽  
Vol 18 (5-8) ◽  
pp. 704-706 ◽  
Author(s):  
R. Ramamurti ◽  
M. Becker ◽  
T. Schuelke ◽  
T.A. Grotjohn ◽  
D.K. Reinhard ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Boron Doped ◽  
Single Crystal Diamond

scholarly journals Coessential-connection by microwave plasma chemical vapor deposition: a common process towards wafer scale single crystal diamond

2021 ◽  
Vol 1 (1) ◽  
pp. 47-62
Author(s):  
Guoyang Shu ◽  
Bing Dai ◽  
Andrey Bolshakov ◽  
Weihua Wang ◽  
Yang Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Wafer Scale ◽  
Plasma Chemical Vapor Deposition ◽  
Single Crystal Diamond ◽  
Common Process

Point‐Arc Remote Plasma Chemical Vapor Deposition for High‐Quality Single‐Crystal Diamond Selective Growth

2019 ◽  
Vol 216 (21) ◽  
pp. 1900227
Author(s):  
Wenxi Fei ◽  
Masafumi Inaba ◽  
Haruka Hoshino ◽  
Ikuto Tsuyusaki ◽  
Sora Kawai ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Selective Growth ◽  
Plasma Chemical ◽  
High Quality ◽  
Plasma Chemical Vapor Deposition ◽  
High Quality Single Crystal ◽  
Single Crystal Diamond
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