Molecular beam mass spectrometry analysis of gaseous species responsible for diamond deposition in microwave plasmas

2002 ◽  
Vol 12 (4) ◽  
pp. 75-84 ◽  
Author(s):  
O. Aubry ◽  
J.-L. Delfau ◽  
C. Met ◽  
M. I. De Barros ◽  
L. Vandenbulcke ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Molecular Beam ◽  
Mass Spectrometry Analysis ◽  
Gaseous Species ◽  
Microwave Plasmas ◽  
Diamond Deposition ◽  
Spectrometry Analysis ◽  
Molecular Beam Mass Spectrometry

Precursors of diamond films analysed by molecular beam mass spectrometry of microwave plasmas

2004 ◽  
Vol 13 (1) ◽  
pp. 116-124 ◽  
Author(s):  
O Aubry ◽  
J.-L Delfau ◽  
C Met ◽  
L Vandenbulcke ◽  
C Vovelle
Keyword(s):  
Mass Spectrometry ◽  
Molecular Beam ◽  
Diamond Films ◽  
Microwave Plasmas ◽  
Molecular Beam Mass Spectrometry
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