ELECTRON ENERGY DISTRIBUTION FUNCTION AND ATOM IONIZATION PROCESSES IN HIGH FREQUENCY DISCHARGE MERCURY-ARGON PLASMA

Le Journal de Physique Colloques ◽

10.1051/jphyscol:19797103 ◽

1979 ◽

Vol 40 (C7) ◽

pp. C7-209-C7-210

Author(s):

S. D. Wagner ◽

I. S. Nisconen

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Ionization Processes ◽

Atom Ionization

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Electron energy distribution function in the collisional-radiative model of an argon plasma

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/18/3/005 ◽

1985 ◽

Vol 18 (3) ◽

pp. 347-358 ◽

Author(s):

J Vlcek ◽

V Pelikan

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Collisional Radiative Model ◽

Radiative Model

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Formation of the Electron Energy Distribution Function in the Plasma of a High-Frequency Discharge in the Presence of Microparticles

HERALD of Dagestan State University ◽

10.21779/2542-0321-2021-36-4-20-20-27 ◽

2021 ◽

Vol 36 (4) ◽

pp. 20-27

Author(s):

N.A. Ashurbekov ◽

◽

I.G. Ramazanov ◽

K.M. Rabadanov ◽

◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

High Frequency Discharge

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Effect of Electron Energy Distribution Function on Spectroscopic Characteristics of Microwave Discharge Argon Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.5432 ◽

2002 ◽

Vol 41 (Part 1, No. 8) ◽

pp. 5432-5441 ◽

Author(s):

Ryouji Kashiwazaki ◽

Hiroshi Akatsuka

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Microwave Discharge ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Spectroscopic Characteristics

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Theoretical study on the electron energy distribution function and electron transport parameters of argon plasma

10.1117/12.2182243 ◽

2015 ◽

Author(s):

Yachun Zhang ◽

Xiang He ◽

Jianping Chen ◽

Jian Lu ◽

Xiaowu Ni ◽

...

Keyword(s):

Distribution Function ◽

Electron Transport ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Theoretical Study ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Transport Parameters

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Electron energy distribution function of an He-Ne mixture in a high-frequency discharge

Soviet Journal of Quantum Electronics ◽

10.1070/qe1976v006n09abeh011843 ◽

1976 ◽

Vol 6 (9) ◽

pp. 1078-1080 ◽

Author(s):

E P Ostapchenko ◽

V A Os'kin ◽

V B Ryumin ◽

V A Stepanov

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

High Frequency Discharge

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Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency

Acta Physica Sinica ◽

10.7498/aps.65.055203 ◽

2016 ◽

Vol 65 (5) ◽

pp. 055203

Author(s):

Wang Jun ◽

Wang Tao ◽

Tang Cheng-Shuang ◽

Xin Yu

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Very High Frequency ◽

Capacitively Coupled ◽

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Electron energy distribution function in a moderately ionized argon plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/10/2/303 ◽

2001 ◽

Vol 10 (2) ◽

pp. 134-146 ◽

Author(s):

A A Matveyev ◽

V P Silakov

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Optical diagnostics for the highly populated tail of an electron energy distribution function in very-high-frequency capacitively coupled plasma using spin- and dipole-forbidden lines

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/aa6cf8 ◽

2017 ◽

Vol 50 (22) ◽

pp. 225201 ◽

Author(s):

Hyun-Joon Roh ◽

Nam-Kyun Kim ◽

Sangwon Ryu ◽

Yunchang Jang ◽

Gon-Ho Kim

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Very High Frequency ◽

Capacitively Coupled ◽

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Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/11/4/320 ◽

2002 ◽

Vol 11 (4) ◽

pp. 525-543 ◽

Author(s):

V A Godyak ◽

R B Piejak ◽

B M Alexandrovich

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Inductively Coupled

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Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma

Thin Solid Films ◽

10.1016/j.tsf.2011.01.218 ◽

2011 ◽

Vol 519 (20) ◽

pp. 7009-7013 ◽

Author(s):

Hyo-Chang Lee ◽

Jin-Young Bang ◽

Chin-Wook Chung

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled

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