Epitaxial growth and surface‐acoustic‐wave properties of LiTaO3films grown by pulsed laser deposition

1993 ◽  
Vol 62 (23) ◽  
pp. 3046-3048 ◽  
Author(s):  
Yoshihiko Shibata ◽  
Kiyoshi Kaya ◽  
Kageyasu Akashi ◽  
Masaki Kanai ◽  
Tomoji Kawai ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Epitaxial Growth ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Wave Properties

Epitaxial growth and surface acoustic wave properties of lithium niobate films grown by pulsed laser deposition

1995 ◽  
Vol 77 (4) ◽  
pp. 1498-1503 ◽  
Author(s):  
Yoshihiko Shibata ◽  
Kiyoshi Kaya ◽  
Kageyasu Akashi ◽  
Masaki Kanai ◽  
Tomoji Kawai ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Epitaxial Growth ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Wave Properties

Surface Acoustic Wave Properties of Lithium Tantalate Films Grown by Pulsed Laser Deposition

1995 ◽  
Vol 34 (Part 1, No. 1) ◽  
pp. 249-253 ◽  
Author(s):  
Yoshihiko Shibata ◽  
Naohiro Kuze ◽  
Masahiro Matsui ◽  
Yasuhito Kanno ◽  
KiyoshiKaya ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Lithium Tantalate ◽  
Laser Deposition ◽  
Wave Properties

scholarly journals Development of Pd/TiO2 Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H2 Gas Sensor

Nanomaterials ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 760 ◽  
Author(s):  
Izabela Constantinoiu ◽  
Cristian Viespe
Keyword(s):  
Acoustic Wave ◽  
Frequency Shift ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Limit Of Detection ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
High Porosity ◽  
Porous Films ◽  
Sem Images

The influence of sensitive porous films obtained by pulsed laser deposition (PLD) on the response of surface acoustic wave (SAW) sensors on hydrogen at room temperature (RT) was studied. Monolayer films of TiO2 and bilayer films of Pd/TiO2 were deposited on the quartz substrates of SAW sensors. By varying the oxygen and argon pressure in the PLD deposition chamber, different morphologies of the sensitive films were obtained, which were analyzed based on scanning electron microscopy (SEM) images. SAW sensors were realized with different porosity degrees, and these were tested at different hydrogen concentrations. It has been confirmed that the high porosity of the film and the bilayer structure leads to a higher frequency shift and allow the possibility to make tests at lower concentrations. Thus, the best sensor, Pd-1500/TiO2-600, with the deposition pressure of 600 mTorr for TiO2 and 1500 mTorr for Pd, had a frequency shift of 1.8 kHz at 2% hydrogen concentration, a sensitivity of 0.10 Hz/ppm and a limit of detection (LOD) of 1210 ppm. SAW sensors based on such porous films allow the detection of hydrogen but also of other gases at RT, and by PLD method such sensitive porous and nanostructured films can be easily developed.

Pulsed laser deposition of La0.67Ca0.33MnO3 thin films on LiNbO3 and surface acoustic wave studies

2006 ◽  
Vol 510 (1-2) ◽  
pp. 77-81 ◽  
Author(s):  
Andreas Heinrich ◽  
Andreas L. Hörner ◽  
Achim Wixforth ◽  
Bernd Stritzker
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition

Growth of C-Axis Oriented LiNbO3Film on Sapphire by Pulsed Laser Deposition for Surface Acoustic Wave Applications

2009 ◽  
Vol 381 (1) ◽  
pp. 92-99 ◽  
Author(s):  
Wen-Ching Shih ◽  
Xiao-Yun Sun ◽  
Tzyy-Long Wang ◽  
Mu-Shiang Wu
Keyword(s):  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition

Epitaxial growth and ferroelectric properties of SrBi2Nb2O9(115) thin films grown by pulsed-laser deposition on epitaxial Pt(111) electrode

2003 ◽  
Vol 83 (26) ◽  
pp. 5500-5502 ◽  
Author(s):  
J.-R. Duclère ◽  
M. Guilloux-Viry ◽  
V. Bouquet ◽  
A. Perrin ◽  
E. Cattan ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Epitaxial Growth ◽  
Ferroelectric Properties ◽  
Pulsed Laser ◽  
Laser Deposition

Epitaxial growth of Ba1−xKxBiO3thin films by pulsed‐laser deposition

1993 ◽  
Vol 62 (4) ◽  
pp. 414-416 ◽  
Author(s):  
D. P. Norton ◽  
J. D. Budai ◽  
B. C. Chakoumakos ◽  
R. Feenstra
Keyword(s):  
Pulsed Laser Deposition ◽  
Epitaxial Growth ◽  
Pulsed Laser ◽  
Laser Deposition

Epitaxial growth of Al-doped ZnO thin films grown by pulsed laser deposition

2002 ◽  
Vol 420-421 ◽  
pp. 107-111 ◽  
Author(s):  
H Kim ◽  
J.S Horwitz ◽  
S.B Qadri ◽  
D.B Chrisey
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Epitaxial Growth ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Thin Films ◽  
Doped Zno

Epitaxial growth of optical Ba2NaNb5O15waveguide film by pulsed laser deposition

1994 ◽  
Vol 65 (16) ◽  
pp. 1995-1997 ◽  
Author(s):  
J. M. Liu ◽  
F. Zhang ◽  
Z. G. Liu ◽  
S. N. Zhu ◽  
L. J. Shi ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Epitaxial Growth ◽  
Pulsed Laser ◽  
Laser Deposition
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