Growth ofc-Axis-Oriented LiNbO3Films on ZnO/SiO2/Si Substrate by Pulsed Laser Deposition for Surface Acoustic Wave Applications

2008 ◽  
Vol 47 (5) ◽  
pp. 4056-4059 ◽  
Author(s):  
Wen-Ching Shih ◽  
Tzyy-Long Wang ◽  
Xiao-Yun Sun ◽  
Mu-Shiang Wu
Keyword(s):  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Si Substrate

scholarly journals Development of Pd/TiO2 Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H2 Gas Sensor

Nanomaterials ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 760 ◽  
Author(s):  
Izabela Constantinoiu ◽  
Cristian Viespe
Keyword(s):  
Acoustic Wave ◽  
Frequency Shift ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Limit Of Detection ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
High Porosity ◽  
Porous Films ◽  
Sem Images

The influence of sensitive porous films obtained by pulsed laser deposition (PLD) on the response of surface acoustic wave (SAW) sensors on hydrogen at room temperature (RT) was studied. Monolayer films of TiO2 and bilayer films of Pd/TiO2 were deposited on the quartz substrates of SAW sensors. By varying the oxygen and argon pressure in the PLD deposition chamber, different morphologies of the sensitive films were obtained, which were analyzed based on scanning electron microscopy (SEM) images. SAW sensors were realized with different porosity degrees, and these were tested at different hydrogen concentrations. It has been confirmed that the high porosity of the film and the bilayer structure leads to a higher frequency shift and allow the possibility to make tests at lower concentrations. Thus, the best sensor, Pd-1500/TiO2-600, with the deposition pressure of 600 mTorr for TiO2 and 1500 mTorr for Pd, had a frequency shift of 1.8 kHz at 2% hydrogen concentration, a sensitivity of 0.10 Hz/ppm and a limit of detection (LOD) of 1210 ppm. SAW sensors based on such porous films allow the detection of hydrogen but also of other gases at RT, and by PLD method such sensitive porous and nanostructured films can be easily developed.

Epitaxial growth and surface‐acoustic‐wave properties of LiTaO3films grown by pulsed laser deposition

1993 ◽  
Vol 62 (23) ◽  
pp. 3046-3048 ◽  
Author(s):  
Yoshihiko Shibata ◽  
Kiyoshi Kaya ◽  
Kageyasu Akashi ◽  
Masaki Kanai ◽  
Tomoji Kawai ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Epitaxial Growth ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Wave Properties

Epitaxial growth and surface acoustic wave properties of lithium niobate films grown by pulsed laser deposition

1995 ◽  
Vol 77 (4) ◽  
pp. 1498-1503 ◽  
Author(s):  
Yoshihiko Shibata ◽  
Kiyoshi Kaya ◽  
Kageyasu Akashi ◽  
Masaki Kanai ◽  
Tomoji Kawai ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Epitaxial Growth ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Wave Properties

Surface Acoustic Wave Properties of Lithium Tantalate Films Grown by Pulsed Laser Deposition

1995 ◽  
Vol 34 (Part 1, No. 1) ◽  
pp. 249-253 ◽  
Author(s):  
Yoshihiko Shibata ◽  
Naohiro Kuze ◽  
Masahiro Matsui ◽  
Yasuhito Kanno ◽  
KiyoshiKaya ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Lithium Tantalate ◽  
Laser Deposition ◽  
Wave Properties

Pulsed laser deposition of La0.67Ca0.33MnO3 thin films on LiNbO3 and surface acoustic wave studies

2006 ◽  
Vol 510 (1-2) ◽  
pp. 77-81 ◽  
Author(s):  
Andreas Heinrich ◽  
Andreas L. Hörner ◽  
Achim Wixforth ◽  
Bernd Stritzker
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition

Growth of C-Axis Oriented LiNbO3Film on Sapphire by Pulsed Laser Deposition for Surface Acoustic Wave Applications

2009 ◽  
Vol 381 (1) ◽  
pp. 92-99 ◽  
Author(s):  
Wen-Ching Shih ◽  
Xiao-Yun Sun ◽  
Tzyy-Long Wang ◽  
Mu-Shiang Wu
Keyword(s):  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition

Research of anti-reflective and protective DLC Film on Si Substrate by Femto-second Pulsed Laser Deposition

2010 ◽  
Vol 22 (8) ◽  
pp. 1705-1708 ◽  
Author(s):  
王淑云 Wang Shuyun ◽  
郭延龙 Guo Yanlong ◽  
刘旭 Liu Xu ◽  
曹海源 Cao Haiyuan ◽  
王会升 Wang Huisheng ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Si Substrate ◽  
Dlc Film

scholarly journals The Effect of Strontium Doping on LaFeO3 Thin Films Deposited by the PLD Method

Catalysts ◽  
2020 ◽  
Vol 10 (9) ◽  
pp. 954
Author(s):  
Anna Cyza ◽  
Łukasz Cieniek ◽  
Tomasz Moskalewicz ◽  
Wojciech Maziarz ◽  
Jan Kusiński ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Catalytic Properties ◽  
Pulsed Laser ◽  
Grain Morphology ◽  
Laser Deposition ◽  
Si Substrate ◽  
Tem Analysis ◽  
Small Grains

The aim of the presented investigations was to deposit the thin films La1−xSrxFeO3 (x = 0, 0.1, 0.2) on (100) Si substrate by using the Pulsed Laser Deposition (PLD) method. Structure was exanimated by using XRD, SEM, AFM, TEM and XPS methods. The catalytic properties were analyzed in 4 ppm acetone atmosphere. The doping of Sr thin films La1−xSrxFeO3 (x = 0, 0.1, 0.2) resulted in a decrease in the size of the crystallites, the volume of the elemental cell and change in the grain morphology. In the LaFeO3 and La0.9Sr0.1FeO3, clusters around which small grains grow are visible in the structure, while in the layer La0.8Sr0.2FeO3, the visible grains are elongated. The TEM analysis has shown that the obtained thin films had a thickness in the range 150–170 nm with triangular or flat column ends. The experiment performed in the presence of gases allowed us to conclude that the surfaces (101/020) in the triangle-shaped columns and the plane (121/200) faces in flat columns were exposed to gases. The best properties in the presence of CH3COCH3 gas were noted for LaFeO3 thin film with triangle columns ending with orientation (101/020).

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