Pulsed laser deposition of La0.67Ca0.33MnO3 thin films on LiNbO3 and surface acoustic wave studies

2006 ◽  
Vol 510 (1-2) ◽  
pp. 77-81 ◽  
Author(s):  
Andreas Heinrich ◽  
Andreas L. Hörner ◽  
Achim Wixforth ◽  
Bernd Stritzker
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition

scholarly journals Development of Pd/TiO2 Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H2 Gas Sensor

Nanomaterials ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 760 ◽  
Author(s):  
Izabela Constantinoiu ◽  
Cristian Viespe
Keyword(s):  
Acoustic Wave ◽  
Frequency Shift ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Limit Of Detection ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
High Porosity ◽  
Porous Films ◽  
Sem Images

The influence of sensitive porous films obtained by pulsed laser deposition (PLD) on the response of surface acoustic wave (SAW) sensors on hydrogen at room temperature (RT) was studied. Monolayer films of TiO2 and bilayer films of Pd/TiO2 were deposited on the quartz substrates of SAW sensors. By varying the oxygen and argon pressure in the PLD deposition chamber, different morphologies of the sensitive films were obtained, which were analyzed based on scanning electron microscopy (SEM) images. SAW sensors were realized with different porosity degrees, and these were tested at different hydrogen concentrations. It has been confirmed that the high porosity of the film and the bilayer structure leads to a higher frequency shift and allow the possibility to make tests at lower concentrations. Thus, the best sensor, Pd-1500/TiO2-600, with the deposition pressure of 600 mTorr for TiO2 and 1500 mTorr for Pd, had a frequency shift of 1.8 kHz at 2% hydrogen concentration, a sensitivity of 0.10 Hz/ppm and a limit of detection (LOD) of 1210 ppm. SAW sensors based on such porous films allow the detection of hydrogen but also of other gases at RT, and by PLD method such sensitive porous and nanostructured films can be easily developed.

Epitaxial growth and surface‐acoustic‐wave properties of LiTaO3films grown by pulsed laser deposition

1993 ◽  
Vol 62 (23) ◽  
pp. 3046-3048 ◽  
Author(s):  
Yoshihiko Shibata ◽  
Kiyoshi Kaya ◽  
Kageyasu Akashi ◽  
Masaki Kanai ◽  
Tomoji Kawai ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Epitaxial Growth ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Wave Properties

Epitaxial growth and surface acoustic wave properties of lithium niobate films grown by pulsed laser deposition

1995 ◽  
Vol 77 (4) ◽  
pp. 1498-1503 ◽  
Author(s):  
Yoshihiko Shibata ◽  
Kiyoshi Kaya ◽  
Kageyasu Akashi ◽  
Masaki Kanai ◽  
Tomoji Kawai ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Epitaxial Growth ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Wave Properties

Surface Acoustic Wave Properties of Lithium Tantalate Films Grown by Pulsed Laser Deposition

1995 ◽  
Vol 34 (Part 1, No. 1) ◽  
pp. 249-253 ◽  
Author(s):  
Yoshihiko Shibata ◽  
Naohiro Kuze ◽  
Masahiro Matsui ◽  
Yasuhito Kanno ◽  
KiyoshiKaya ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Lithium Tantalate ◽  
Laser Deposition ◽  
Wave Properties

Pulsed laser deposition of piezoelectric ZnO thin films for bulk acoustic wave devices

2014 ◽  
Vol 288 ◽  
pp. 572-578 ◽  
Author(s):  
Rafik Serhane ◽  
Samira Abdelli-Messaci ◽  
Slimane Lafane ◽  
Hammouche Khales ◽  
Walid Aouimeur ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Bulk Acoustic Wave ◽  
Zno Thin Films ◽  
Acoustic Wave Devices

Growth of C-Axis Oriented LiNbO3Film on Sapphire by Pulsed Laser Deposition for Surface Acoustic Wave Applications

2009 ◽  
Vol 381 (1) ◽  
pp. 92-99 ◽  
Author(s):  
Wen-Ching Shih ◽  
Xiao-Yun Sun ◽  
Tzyy-Long Wang ◽  
Mu-Shiang Wu
Keyword(s):  
Acoustic Wave ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Pulsed Laser ◽  
Laser Deposition

Pulsed laser deposition of PbMg1/3Nb2/3O3 thin films and PbMg1/3Nb2/3O3/PbTiO3 multilayers

2001 ◽  
Vol 11 (PR11) ◽  
pp. Pr11-65-Pr11-69
Author(s):  
N. Lemée ◽  
H. Bouyanfif ◽  
J. L. Dellis ◽  
M. El Marssi ◽  
M. G. Karkut ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition

SrBi2Nb2O9 ferroelectric thin films deposited by pulsed laser deposition on textured and epitaxied platinum electrodes

2001 ◽  
Vol 11 (PR11) ◽  
pp. Pr11-133-Pr11-137
Author(s):  
J. R. Duclère ◽  
M. Guilloux-Viry ◽  
A. Perrin ◽  
A. Dauscher ◽  
S. Weber ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Ferroelectric Thin Films ◽  
Laser Deposition ◽  
Platinum Electrodes

Microstructural and Electrical Characterization of Barium Strontium Titanatebased Solid Solution Thin Films Deposited on Ceramic Substrates by Pulsed Laser Deposition

2002 ◽  
Vol 720 ◽  
Author(s):  
Costas G. Fountzoulas ◽  
Daniel M. Potrepka ◽  
Steven C. Tidrow
Keyword(s):  
Thin Films ◽  
Dielectric Constant ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Electrical Characterization ◽  
Field Variable ◽  
Laser Deposition ◽  
X Ray Diffraction ◽  
Ceramic Substrates ◽  
Nominal Thickness

AbstractFerroelectrics are multicomponent materials with a wealth of interesting and useful properties, such as piezoelectricity. The dielectric constant of the BSTO ferroelectrics can be changed by applying an electric field. Variable dielectric constant results in a change in phase velocity in the device allowing it to be tuned in real time for a particular application. The microstructure of the film influences the electronic properties which in turn influences the performance of the film. Ba0.6Sr0.4Ti1-y(A 3+, B5+)yO3 thin films, of nominal thickness of 0.65 μm, were synthesized initially at substrate temperatures of 400°C, and subsequently annealed to 750°C, on LaAlO3 (100) substrates, previously coated with LaSrCoO conductive buffer layer, using the pulsed laser deposition technique. The microstructural and physical characteristics of the postannealed thin films have been studied using x-ray diffraction, scanning electron microscopy, and nano indentation and are reported. Results of capacitance measurements are used to obtain dielectric constant and tunability in the paraelectric (T>Tc) regime.

Sign in / Sign up

Export Citation Format

Share Document