Characterization of GaAs surfaces treated with phosphine gas photodecomposed by an ArF excimer laser

1998 ◽  
Vol 72 (12) ◽  
pp. 1472-1474 ◽  
Author(s):  
Takashi Sugino ◽  
Hideaki Ninomiya ◽  
Junji Shirafuji ◽  
Koichiro Matsuda
Keyword(s):  
Excimer Laser ◽  
Arf Excimer Laser

Characterization of $\bf LiNbO_{3}$ Optical-Waveguide Film Grown on Sapphire by ArF Excimer Laser Ablation

1995 ◽  
Vol 34 (Part 1, No. 11) ◽  
pp. 6084-6091 ◽  
Author(s):  
Masamitsu Haruna ◽  
\ast ◽  
Hideki Ishizuki ◽  
Jun Tsutsumi ◽  
Yusaku Shimaoka ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Optical Waveguide ◽  
Excimer Laser ◽  
Excimer Laser Ablation ◽  
Arf Excimer Laser

Laser ablation characterization of an ArF excimer-laser-ablated plasma

1993 ◽  
Author(s):  
Ye Y. Teng ◽  
Zen W. Hwang ◽  
Yong I. Lee ◽  
Joseph Sneddon
Keyword(s):  
Laser Ablation ◽  
Excimer Laser ◽  
Arf Excimer Laser

Characterization of photoresists for ArF-excimer laser lithography using monoenergetic positron beams

2003 ◽  
Vol 42 (2) ◽  
pp. 341-346
Author(s):  
A. Uedono ◽  
T. Ohdaira ◽  
R. Suzuki ◽  
T. Mikado ◽  
S. Fukui ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Lithography ◽  
Arf Excimer Laser ◽  
Positron Beams

Growth and Characterization of Epitaxial InN Films on Sapphire Substrate using an ArF Excimer Laser-Assisted Metalorganic Vapor-Phase Epitaxy (LA-MOVPE)

2003 ◽  
Vol 42 (Part 1, No. 12) ◽  
pp. 7284-7289 ◽  
Author(s):  
Ashraful Ghani Bhuiyan ◽  
Tatsuya Tanaka ◽  
Ken Kasashima ◽  
Akihiro Hashimoto ◽  
Akio Yamamoto
Keyword(s):  
Excimer Laser ◽  
Vapor Phase ◽  
Sapphire Substrate ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Arf Excimer Laser

Characterization of CaF2Substrates for ArF Excimer Laser

2011 ◽  
Vol 38 (10) ◽  
pp. 1002004
Author(s):  
邓文渊 Deng Wenyuan ◽  
金春水 Jin Chunshui ◽  
靳京城 Jin Jingcheng
Keyword(s):  
Excimer Laser ◽  
Arf Excimer Laser
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