Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma

1999 ◽  
Vol 75 (3) ◽  
pp. 328-330 ◽  
Author(s):  
S. A. Moshkalyov ◽  
P. G. Steen ◽  
S. Gomez ◽  
W. G. Graham
Keyword(s):  
Radio Frequency ◽  
Discharge Plasma ◽  
Low Pressure ◽  
Low Energy ◽  
Low Energy Electrons ◽  
Radio Frequency Discharge

scholarly journals MATHEMATICAL MODEL OF THE INTERACTION OF LOW-ENERGY INERT GAS IONS WITH POLYPROPYLENE IN RADIO-FREQUENCY PLASMA OF LOW PRESSURE

2021 ◽  
Vol 53 (3) ◽  
pp. 18-23
Author(s):  
Yulia A. Timoshina ◽  
Emil F. Voznesensky ◽  
Victor S. Zheltukhin
Keyword(s):  
Radio Frequency ◽  
Argon Atom ◽  
Argon Plasma ◽  
Low Pressure ◽  
Low Energy ◽  
Fibrous Materials ◽  
Frequency Plasma ◽  
Argon Ion Bombardment ◽  
Low Energy Ions ◽  
Argon Ion

Results of the molecular dynamic simulation of the interaction of low-energy ions (from 10 to 100 eV) with the surface of polypropylene fibrous materials in low pressure radio-frequency (RF) argon plasma is presented. A full-atomic model using the LAMMPS classical molecular dynamics code was made. As a result of numerical calculations, it was found that argon ion bombardment initiates the breaking both of an intermolecular and intramolecular bond of polypropylene with sputtered particles being the hydrocarbon radicals and single atoms. The depth of implantation of the ion is determined, the change in the kinetic energy of the argon atom and the temperature of the simulated cell is obtained.

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