Modeling and analysis of hydrogen–methane plasma in electron cyclotron resonance chemical vapor deposition of diamond-like carbon

Journal of Applied Physics ◽

10.1063/1.1421038 ◽

2002 ◽

Vol 91 (1) ◽

pp. 40 ◽

Author(s):

S. F. Yoon ◽

K. H. Tan ◽

Rusli ◽

J. Ahn

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Modeling And Analysis

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Effect of microwave power on diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00360-5 ◽

2000 ◽

Vol 9 (12) ◽

pp. 2024-2030 ◽

Author(s):

S.F. Yoon ◽

K.H. Tan ◽

J. Rusli ◽

Ahn ◽

Q.F. Huang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Power ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Deposition of diamond-like carbon films using the screen grid method in electron cyclotron resonance chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581560 ◽

1999 ◽

Vol 17 (1) ◽

pp. 121-124 ◽

Author(s):

S. F. Yoon ◽

Rusli ◽

J. Ahn ◽

Q. Zhang ◽

Y. S. Wu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Grid Method ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

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Dielectric properties of molybdenum-containing diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(02)00049-4 ◽

2002 ◽

Vol 409 (2) ◽

pp. 211-219 ◽

Author(s):

Q.F. Huang ◽

S.F. Yoon ◽

Rusli ◽

Q. Zhang ◽

J. Ahn

Keyword(s):

Chemical Vapor Deposition ◽

Dielectric Properties ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Conduction mechanism in molybdenum-containing diamond-like carbon deposited using electron cyclotron resonance chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1308102 ◽

2000 ◽

Vol 88 (7) ◽

pp. 4191 ◽

Author(s):

Q. F. Huang ◽

S. F. Yoon ◽

Rusli ◽

H. Yang ◽

B. Gan ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Conduction Mechanism ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Diamond-Like Carbon Thin Films Deposition on Glass Using an Electron Cyclotron Resonance (ECR) Microwave Chemical Vapor Deposition (CVD) System

Advanced Tribology ◽

10.1007/978-3-642-03653-8_270 ◽

2009 ◽

pp. 816-819

Author(s):

Guangan Zhang ◽

Liping Wang ◽

Pengxun Yan ◽

Junyan Zhang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Carbon Thin Films

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Comparative study on the effects of ion density and ion energy on diamond-like carbon deposited by electron cyclotron resonance chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1359163 ◽

2001 ◽

Vol 89 (9) ◽

pp. 4830-4835 ◽

Author(s):

S. F. Yoon ◽

K. H. Tan ◽

Rusli ◽

J. Ahn ◽

Q. F. Huang

Keyword(s):

Chemical Vapor Deposition ◽

Comparative Study ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Ion Density ◽

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Effect of process pressure on diamond-like carbon deposited using electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(01)01177-4 ◽

2001 ◽

Vol 396 (1-2) ◽

pp. 62-68 ◽

Author(s):

S.F Yoon ◽

K.H Tan ◽

Rusli ◽

J Ahn ◽

Q.F Huang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Process Pressure

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Growth characterization and properties of diamond-like carbon films by electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(01)01010-0 ◽

2001 ◽

Vol 392 (1) ◽

pp. 16-21 ◽

Author(s):

B.H Lung ◽

M.J Chiang ◽

M.H Hon

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Growth Characterization

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Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Evolution of structure in thin microcrystalline silicon films grown by electron-cyclotron resonance chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1289783 ◽

2000 ◽

Vol 88 (7) ◽

pp. 4376 ◽

Author(s):

M. Birkholz ◽

B. Selle ◽

E. Conrad ◽

K. Lips ◽

W. Fuhs

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Silicon Films ◽

Microcrystalline Silicon ◽

Evolution Of Structure

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