Noninvasive monitoring of ion energy drift in an inductively coupled plasma reactor
1999 ◽
Vol 17
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pp. 2061
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2020 ◽
Vol 38
(3)
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pp. 032408
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High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2010 ◽
Vol 14
(1-2)
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pp. 119-127
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2018 ◽
Vol 47
(9)
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pp. 4964-4969
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2002 ◽
Vol 20
(1)
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pp. 43-52
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