Electron cyclotron resonance plasma source by using Ku-band traveling-wave tube amplifier for broad ion-beam processing
2006 ◽
Vol 77
(3)
◽
pp. 03C104
◽
Keyword(s):
Ion Beam
◽
2006 ◽
Vol 77
(11)
◽
pp. 113503
◽
1997 ◽
Vol 36
(Part 1, No. 7B)
◽
pp. 4576-4582
◽
1994 ◽
Vol 12
(4)
◽
pp. 1281-1286
◽
1993 ◽
Vol 32
(Part 2, No. 6A)
◽
pp. L802-L805
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1990 ◽
Vol 61
(9)
◽
pp. 2407-2411
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1994 ◽
Vol 12
(4)
◽
pp. 1241-1243
1997 ◽
Vol 15
(3)
◽
pp. 736
◽
1995 ◽
Vol 13
(2)
◽
pp. 343-348
◽