Electron cyclotron resonance plasma source for conductive film deposition
1994 ◽
Vol 12
(4)
◽
pp. 1281-1286
◽
1995 ◽
Vol 13
(3)
◽
pp. 815-819
◽
1993 ◽
Vol 32
(Part 2, No. 6A)
◽
pp. L802-L805
◽
1994 ◽
Vol 12
(4)
◽
pp. 1241-1243
1990 ◽
Vol 61
(9)
◽
pp. 2407-2411
◽
1997 ◽
Vol 15
(3)
◽
pp. 736
◽
1995 ◽
Vol 13
(2)
◽
pp. 343-348
◽
1997 ◽
Vol 15
(3)
◽
pp. 707-711
◽