Electrical Characterisation of Gate Dielectrics Deposited with Multipolar Electron Cyclotron Resonance Plasma Source

2000 ◽  
Author(s):  
G.I. Isai ◽  
A.Y. Kovalgin ◽  
J. Holleman ◽  
P.H. Woerlee ◽  
H. Wallinga ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Gate Dielectrics ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

1993 ◽  
Vol 32 (Part 2, No. 6A) ◽  
pp. L802-L805 ◽  
Author(s):  
Akira Ishii ◽  
Yoshiyuki Sakaguchi ◽  
Shoichiro Minomo ◽  
Michio Taniguchi ◽  
Masato Sugiyo ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Carbon Film ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Electron Cyclotron Resonance Plasma ◽  
Diamond Like Carbon Film ◽  
Resonance Plasma
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